Matthias Kuhn

Follow

Person

Moegglingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Geometric beamsplitter and method for its fabrication
- Patent number 6,809,871
- Issue date Oct 26, 2004
- Carl Zeiss Semiconductor Manufacturing Technologies AG
- Matthias Heller
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Geometric beamsplitter and method for its fabrication
- Publication number 20030026001
- Publication date Feb 6, 2003
- CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Matthias Heller
- G02 - OPTICS