Matthias Kuss

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Sinningen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure system, beam delivery system and method of gene...
- Patent number 7,995,280
- Issue date Aug 9, 2011
- Carl Zeiss SMT GmbH
- Matthias Kuss
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Projection Exposure System, Beam Delivery System and Method of Gene...
- Publication number 20120013878
- Publication date Jan 19, 2012
- Carl Zeiss SMT GMBH
- Matthias Kuss
- B82 - NANO-TECHNOLOGY
Information Patent Application
Projection Exposure System, Beam Delivery System and Method of Gene...
- Publication number 20080225921
- Publication date Sep 18, 2008
- Carl Zeiss SMT AG
- Matthias Kuss
- B82 - NANO-TECHNOLOGY