Matthias Lang

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Mogglingen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Aperture unit for a particle beam device
- Patent number 8,779,381
- Issue date Jul 15, 2014
- Carl Zeiss NTS GmbH
- Matthias Lang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Aperture unit for a particle beam device
- Publication number 20120112089
- Publication date May 10, 2012
- Matthias Lang
- H01 - BASIC ELECTRIC ELEMENTS