Matthias Liertzer

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Patents Applicationslast 30 patents

Information Patent Application
Multi-Beam Pattern Definition Device
- Publication number 20230360880
- Publication date Nov 9, 2023
- IMS Nanofabrication GmbH
- Stefan Eder-Kapl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Correction of Thermal Expansion in a Lithographic Device
- Publication number 20230296989
- Publication date Sep 21, 2023
- IMS Nanofabrication GmbH
- Matthias Liertzer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY