Matthias MANGER

Person

Aalen-Unterkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical system and lithography apparatus
- Patent number 12,130,557
- Issue date Oct 29, 2024
- Carl Zeiss SMT GmbH
- Matthias Manger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology system and method for measuring an excitation laser beam...
- Patent number 11,920,977
- Issue date Mar 5, 2024
- Carl Zeiss SMT GmbH
- Matthias Manger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device and method for measuring the beam angle of a light beam guid...
- Patent number 11,737,199
- Issue date Aug 22, 2023
- Carl Zeiss SMT GmbH
- Florian Baumer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for producing a reflecting optical element of a projection e...
- Patent number 11,415,892
- Issue date Aug 16, 2022
- Carl Zeiss SMT GmbH
- Matthias Kaes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring assembly for the frequency-based determination of the pos...
- Patent number 11,274,914
- Issue date Mar 15, 2022
- Carl Zeiss SMT GmbH
- Matthias Manger
- G01 - MEASURING TESTING
Information Patent Grant
Beam propagation camera and method for light beam analysis
- Patent number 11,099,400
- Issue date Aug 24, 2021
- Carl Zeiss SMT GmbH
- Matthias Manger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and device for beam analysis
- Patent number 11,054,305
- Issue date Jul 6, 2021
- Carl Zeiss SMT GmbH
- Matthias Manger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for producing an illumination system for an EUV projection e...
- Patent number 11,048,172
- Issue date Jun 29, 2021
- Carl Zeiss SMT GmbH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for beam analysis
- Patent number 10,605,654
- Issue date Mar 31, 2020
- Carl Zeiss SMT GmbH
- Matthias Manger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for producing an illumination system for an EUV projection e...
- Patent number 10,514,608
- Issue date Dec 24, 2019
- Carl Zeiss SMT GmbH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for analyzing a light beam guided by a beam guidi...
- Patent number 9,823,119
- Issue date Nov 21, 2017
- Carl Zeiss SMT GmbH
- Matthias Manger
- G02 - OPTICS
Information Patent Grant
Projection exposure system for microlithography and method of monit...
- Patent number 9,720,328
- Issue date Aug 1, 2017
- Carl Zeiss SMT GmbH
- Matthias Manger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure system for microlithography and method of monit...
- Patent number 9,235,142
- Issue date Jan 12, 2016
- Carl Zeiss SMT GmbH
- Matthias Manger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring an optical system
- Patent number 8,786,849
- Issue date Jul 22, 2014
- Carl Zeiss SMT GmbH
- Thomas Korb
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a shape of an optical surface based on computat...
- Patent number 8,593,642
- Issue date Nov 26, 2013
- Carl Zeiss SMT GmbH
- Rolf Freimann
- G01 - MEASURING TESTING
Information Patent Grant
Method for calibrating a specimen stage of a metrology system and m...
- Patent number 8,473,237
- Issue date Jun 25, 2013
- Carl Zeiss SMS GmbH
- Alexander Huebel
- G01 - MEASURING TESTING
Information Patent Grant
Optical system for microlithography
- Patent number 8,456,616
- Issue date Jun 4, 2013
- Carl Zeiss SMT GmbH
- Daniel Kraehmer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determination of residual errors
- Patent number 8,416,412
- Issue date Apr 9, 2013
- Carl Zeiss SMS GmbH
- Uwe Schellhorn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining at least one optical property...
- Patent number 7,760,345
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Matthias Manger
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for range-resolved determination of scattered lig...
- Patent number 7,755,748
- Issue date Jul 13, 2010
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for the range-resolved determination of scattered light, ope...
- Patent number 7,408,631
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Michael Arnz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL APPARATUS, METHOD FOR SETTING A TARGET DEFORMATION, AND LIT...
- Publication number 20240103381
- Publication date Mar 28, 2024
- Carl Zeiss SMT GMBH
- Klaus Gwosch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...
- Publication number 20240085800
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Thilo Pollak
- G02 - OPTICS
Information Patent Application
OPTICAL DEVICE, METHOD FOR ADJUSTING A SETPOINT DEFORMATION AND LIT...
- Publication number 20240085783
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Markus Raab
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20240012334
- Publication date Jan 11, 2024
- Carl Zeiss SMT GMBH
- Markus Raab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR MEASURING ACTUATORS IN A PROJECTION EXPOSURE...
- Publication number 20230228798
- Publication date Jul 20, 2023
- Carl Zeiss SMT GMBH
- Markus Raab
- G01 - MEASURING TESTING
Information Patent Application
ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY
- Publication number 20230229091
- Publication date Jul 20, 2023
- Carl Zeiss SMT GMBH
- Matthias Manger
- G01 - MEASURING TESTING
Information Patent Application
ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY
- Publication number 20230229092
- Publication date Jul 20, 2023
- Carl Zeiss SMT GMBH
- Matthias Manger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ASSEMBLY, METHOD FOR CONTROLLING AN OPTICAL ASSEMBLY, AND P...
- Publication number 20230176486
- Publication date Jun 8, 2023
- Carl Zeiss SMT GMBH
- Markus Raab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20230047921
- Publication date Feb 16, 2023
- Carl Zeiss SMT GMBH
- Michel Aliman
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20220382166
- Publication date Dec 1, 2022
- Carl Zeiss SMT GMBH
- Matthias Manger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL DEVICE, CONTROL SYSTEM, METHOD FOR OPERATING A CONTROL SYSTEM
- Publication number 20220368104
- Publication date Nov 17, 2022
- Carl Zeiss SMT GMBH
- Arian KRIESCH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR MEASURING THE BEAM ANGLE OF A LIGHT BEAM GUID...
- Publication number 20210219409
- Publication date Jul 15, 2021
- Carl Zeiss SMT GMBH
- Florian BAUMER
- G02 - OPTICS
Information Patent Application
METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM...
- Publication number 20210190583
- Publication date Jun 24, 2021
- Carl Zeiss SMT GMBH
- Matthias MANGER
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR PRODUCING A REFLECTING OPTICAL ELEMENT OF A PROJECTION E...
- Publication number 20210157244
- Publication date May 27, 2021
- Carl Zeiss SMT GMBH
- Matthias KAES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASURING ASSEMBLY FOR THE FREQUENCY-BASED DETERMINATION OF THE POS...
- Publication number 20210080244
- Publication date Mar 18, 2021
- Carl Zeiss SMT GMBH
- Matthias MANGER
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...
- Publication number 20200110340
- Publication date Apr 9, 2020
- Carl Zeiss SMT GMBH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR BEAM ANALYSIS
- Publication number 20200088571
- Publication date Mar 19, 2020
- Carl Zeiss SMT GMBH
- Matthias Manger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...
- Publication number 20180373158
- Publication date Dec 27, 2018
- Carl Zeiss SMT GMBH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR BEAM ANALYSIS
- Publication number 20180202860
- Publication date Jul 19, 2018
- Carl Zeiss SMT GMBH
- Matthias Manger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD OF MONIT...
- Publication number 20180039184
- Publication date Feb 8, 2018
- Carl Zeiss SMT GMBH
- Matthias Manger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM GUIDED BY A BEAM GUIDI...
- Publication number 20170122803
- Publication date May 4, 2017
- Carl Zeiss SMT GMBH
- Matthias MANGER
- G02 - OPTICS
Information Patent Application
MEASURING ARRANGEMENT FOR USE WHEN DETERMINING TRAJECTORIES OF FLYI...
- Publication number 20160350935
- Publication date Dec 1, 2016
- Carl Zeiss SMT GMBH
- Matthias MANGER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BEAM PROPAGATION CAMERA AND METHOD FOR LIGHT BEAM ANALYSIS
- Publication number 20160341969
- Publication date Nov 24, 2016
- Carl Zeiss SMT GMBH
- Matthias MANGER
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD OF MONIT...
- Publication number 20160266501
- Publication date Sep 15, 2016
- Carl Zeiss SMT GMBH
- Matthias MANGER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE BASED ON COMPUTAT...
- Publication number 20140078513
- Publication date Mar 20, 2014
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G02 - OPTICS
Information Patent Application
METHOD FOR MEASURING AN OPTICAL SYSTEM
- Publication number 20130271749
- Publication date Oct 17, 2013
- Thomas KORB
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETR...
- Publication number 20120229814
- Publication date Sep 13, 2012
- Carl Zeiss SMT GMBH
- Rolf FREIMANN
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD OF MONIT...
- Publication number 20110157571
- Publication date Jun 30, 2011
- Carl Zeiss SMT GMBH
- Matthias Manger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20110069295
- Publication date Mar 24, 2011
- Carl Zeiss SMT GMBH
- Daniel Kraehmer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CALIBRATING A SPECIMEN STAGE OF A METROLOGY SYSTEM AND M...
- Publication number 20100241384
- Publication date Sep 23, 2010
- CARL ZEISS SMS GMBH
- Alexander Huebel
- G01 - MEASURING TESTING

Matthias MANGER

Person

Patents Grantslast 30 patents

Optical system and lithography apparatus

Metrology system and method for measuring an excitation laser beam...

Device and method for measuring the beam angle of a light beam guid...

Method for producing a reflecting optical element of a projection e...

Measuring assembly for the frequency-based determination of the pos...

Beam propagation camera and method for light beam analysis

Method and device for beam analysis

Method for producing an illumination system for an EUV projection e...

Method and device for beam analysis

Method for producing an illumination system for an EUV projection e...

System and method for analyzing a light beam guided by a beam guidi...

Projection exposure system for microlithography and method of monit...

Projection exposure system for microlithography and method of monit...

Method for measuring an optical system

Method of measuring a shape of an optical surface based on computat...

Method for calibrating a specimen stage of a metrology system and m...

Optical system for microlithography

Method for determination of residual errors

Method and apparatus for determining at least one optical property...

Device and method for range-resolved determination of scattered lig...

Device for the range-resolved determination of scattered light, ope...

Patents Applicationslast 30 patents

OPTICAL APPARATUS, METHOD FOR SETTING A TARGET DEFORMATION, AND LIT...

PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...

OPTICAL DEVICE, METHOD FOR ADJUSTING A SETPOINT DEFORMATION AND LIT...

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

METHOD AND DEVICE FOR MEASURING ACTUATORS IN A PROJECTION EXPOSURE...

ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY

ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY

OPTICAL ASSEMBLY, METHOD FOR CONTROLLING AN OPTICAL ASSEMBLY, AND P...

DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS

OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS

CONTROL DEVICE, CONTROL SYSTEM, METHOD FOR OPERATING A CONTROL SYSTEM

DEVICE AND METHOD FOR MEASURING THE BEAM ANGLE OF A LIGHT BEAM GUID...

METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM...

METHOD FOR PRODUCING A REFLECTING OPTICAL ELEMENT OF A PROJECTION E...

MEASURING ASSEMBLY FOR THE FREQUENCY-BASED DETERMINATION OF THE POS...

METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...

METHOD AND DEVICE FOR BEAM ANALYSIS

METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...

METHOD AND DEVICE FOR BEAM ANALYSIS

PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD OF MONIT...

SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM GUIDED BY A BEAM GUIDI...

MEASURING ARRANGEMENT FOR USE WHEN DETERMINING TRAJECTORIES OF FLYI...

BEAM PROPAGATION CAMERA AND METHOD FOR LIGHT BEAM ANALYSIS

PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD OF MONIT...

METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE BASED ON COMPUTAT...

METHOD FOR MEASURING AN OPTICAL SYSTEM

METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETR...

PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD OF MONIT...

OPTICAL SYSTEM FOR MICROLITHOGRAPHY

METHOD FOR CALIBRATING A SPECIMEN STAGE OF A METROLOGY SYSTEM AND M...