Matthias Mueller

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Lauchheim, DE

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Patents Grantslast 30 patents

Information Patent Grant
Illumination optic for EUV projection lithography
- Patent number 10,379,444
- Issue date Aug 13, 2019
- Carl Zeiss SMT GmbH
- Matthias Mueller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
COMPONENT OF AN OPTICAL SYSTEM
- Publication number 20230023575
- Publication date Jan 26, 2023
- Carl Zeiss SMT GMBH
- Matthias Kestel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTIC FOR EUV PROJECTION LITHOGRAPHY
- Publication number 20180074410
- Publication date Mar 15, 2018
- Carl Zeiss SMT GMBH
- Matthias Mueller
- G02 - OPTICS