Matthias Orth

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Neresheim-Elchingen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical component
- Patent number 10,078,271
- Issue date Sep 18, 2018
- Carl Zeiss SMT GmbH
- Severin Waldis
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 9,513,562
- Issue date Dec 6, 2016
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gravitation compensation for optical elements in projection exposur...
- Patent number 9,341,807
- Issue date May 17, 2016
- Carl Zeiss SMT GmbH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 8,885,143
- Issue date Nov 11, 2014
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gravitation compensation for optical elements in projection exposur...
- Patent number 8,854,603
- Issue date Oct 7, 2014
- Carl Zeiss SMT GmbH
- Norbert Muehlberger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REGULATING THE TILTING OF A MIRROR ELEMENT
- Publication number 20150185469
- Publication date Jul 2, 2015
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20150015864
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...
- Publication number 20150009557
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Application
OPTICAL COMPONENT
- Publication number 20140327896
- Publication date Nov 6, 2014
- Severin Waldis
- G02 - OPTICS
Information Patent Application
GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...
- Publication number 20110267596
- Publication date Nov 3, 2011
- Carl Zeiss SMT GMBH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20110235012
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY