Matthias Roos

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum system, in particular EUV lithography system, and optical el...
- Patent number 10,599,052
- Issue date Mar 24, 2020
- Carl Zeiss SMT GmbH
- Matthias Roos
- B08 - CLEANING
Information Patent Grant
Vacuum system, in particular EUV lithography system, and optical el...
- Patent number 10,241,421
- Issue date Mar 26, 2019
- Carl Zeiss SMT GmbH
- Matthias Roos
- B08 - CLEANING
Information Patent Grant
Vacuum linear feed-through and vacuum system having said vacuum lin...
- Patent number 9,952,519
- Issue date Apr 24, 2018
- Carl Zeiss SMT GmbH
- Matthias Roos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
VACUUM SYSTEM, IN PARTICULAR EUV LITHOGRAPHY SYSTEM, AND OPTICAL EL...
- Publication number 20190196344
- Publication date Jun 27, 2019
- Carl Zeiss SMT GMBH
- Matthias Roos
- B08 - CLEANING
Information Patent Application
VACUUM LINEAR FEED-THROUGH AND VACUUM SYSTEM HAVING SAID VACUUM LIN...
- Publication number 20170212428
- Publication date Jul 27, 2017
- Carl Zeiss SMT GMBH
- Matthias Roos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Vacuum System, in Particular EUV Lithography System, and Optical E...
- Publication number 20170168402
- Publication date Jun 15, 2017
- Carl Zeiss SMT GMBH
- Matthias Roos
- B08 - CLEANING