Matthias Ruhm

Follow

Person

Dresden, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for in-die overlay control using FEOL dummy fill layer
- Patent number 10,115,621
- Issue date Oct 30, 2018
- GLOBALFOUNDRIES Inc.
- Peter Moll
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Asymmetric reticle heating of multilayer reticles eliminated by dum...
- Patent number 9,091,943
- Issue date Jul 28, 2015
- GLOBALFOUNDRIES Inc.
- Arthur Hotzel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Member with a cleaning surface and a method of removing contamination
- Patent number 8,648,997
- Issue date Feb 11, 2014
- ASML Netherlands B.V.
- Marcus Theodoor Wilhelmus Van Der Heijden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR DETECTING A DEFECT IN A SPECIMEN
- Publication number 20240151653
- Publication date May 9, 2024
- GLOBALFOUNDRIES U.S. Inc.
- RICHARD PAUL GOOD
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR IN-DIE OVERLAY CONTROL USING FEOL DUMMY FILL LAYER
- Publication number 20170330782
- Publication date Nov 16, 2017
- GLOBALFOUNDRIES INC.
- Peter MOLL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASYMMETRIC RETICLE HEATING OF MULTILAYER RETICLES ELIMINATED BY DUM...
- Publication number 20140185030
- Publication date Jul 3, 2014
- GLOBALFOUNDRIES INC.
- Arthur HOTZEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEMBER WITH A CLEANING SURFACE AND A METHOD OF REMOVING CONTAMINATION
- Publication number 20100141910
- Publication date Jun 10, 2010
- ASML NETHERLANDS B.V.
- Marcus Theodoor Wilhelmus VAN DER HEIJDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY