Matthias Slodowski

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Arrangement for the illumination of a substrate with a plurality of...
- Patent number 8,148,702
- Issue date Apr 3, 2012
- Vistec Electron Beam GmbH
- Hans-Joachim Doering
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for thin-layer metrology
- Patent number 7,349,106
- Issue date Mar 25, 2008
- Vistec Semiconductor Systems Jena GmbH
- Matthias Slodowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement system with an optical measurement arrangement
- Patent number 7,277,190
- Issue date Oct 2, 2007
- Vistec Semiconductor Systems Jena GmbH
- Matthias Slodowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for user guidance in optical inspection and me...
- Patent number 6,775,583
- Issue date Aug 10, 2004
- Leica Microsystems Jena GmbH
- Matthias Slodowski
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Optical measurement arrangement, in particular for layer thickness...
- Patent number 6,618,154
- Issue date Sep 9, 2003
- Leica Microsystems Jena GmbH
- Horst Engel
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for monitoring the light emitted from an illum...
- Patent number 6,456,373
- Issue date Sep 24, 2002
- Leica Microsystems Jena GmbH
- Joachim Wienecke
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Arrangement for the Illumination of a Substrate with a Plurality of...
- Publication number 20100148087
- Publication date Jun 17, 2010
- VISTEC ELECTRON BEAM GMBH
- Hans-Joachim Doering
- B82 - NANO-TECHNOLOGY
Information Patent Application
Optical measurement arrangement
- Publication number 20040169868
- Publication date Sep 2, 2004
- LEICA MICROSYSTEMS JENA GmbH
- Matthias Slodowski
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for thin-layer metrology
- Publication number 20040164725
- Publication date Aug 26, 2004
- LEICA MICROSYSTEMS JENA GmbH
- Matthias Slodowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for user guidance in optical inspection and me...
- Publication number 20020024663
- Publication date Feb 28, 2002
- Matthias Slodowski
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
Optical measurement arrangement, in particular for layer thickness...
- Publication number 20020003217
- Publication date Jan 10, 2002
- Horst Engel
- G01 - MEASURING TESTING