Matthias Sturm

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Waiblingen, DE

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Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT FOR A EUV PROJECTION EXPOSURE SYSTEM
- Publication number 20230126018
- Publication date Apr 27, 2023
- Carl Zeiss SMT GMBH
- Hartmut ENKISCH
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
OPTICAL ELEMENT AND EUV LITHOGRAPHIC SYSTEM
- Publication number 20220179329
- Publication date Jun 9, 2022
- Carl Zeiss SMT GMBH
- Anastasia Gonchar
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING