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Matthias Vaupel
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Gottingen, DE
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Patents Grants
last 30 patents
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Patent Grant
Confocal microscope for determination of a layer thickness and micr...
Patent number
10,436,571
Issue date
Oct 8, 2019
Carl Zeiss Microscopy GmbH
Matthias Vaupel
G01 - MEASURING TESTING
Information
Patent Grant
Method for determining roughness data and/or topography data of sur...
Patent number
9,097,518
Issue date
Aug 4, 2015
Carl Zeiss Microscopy GmbH
Matthias Vaupel
G01 - MEASURING TESTING
Information
Patent Grant
SPR sensor
Patent number
6,867,865
Issue date
Mar 15, 2005
Nanofilm Technologie GmbH
Matthias Vaupel
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Confocal microscope for determination of a layer thickness and micr...
Publication number
20190033054
Publication date
Jan 31, 2019
CARL ZEISS MICROSCOPY GMBH
Matthias Vaupel
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR DETERMINING ROUGHNESS DATA AND/OR TOPOGRAPHY DATA OF SUR...
Publication number
20140285814
Publication date
Sep 25, 2014
Matthias Vaupel
G02 - OPTICS
Information
Patent Application
Ellipsometry Device Provided With A Resonance Platform
Publication number
20070216901
Publication date
Sep 20, 2007
OC OERLIKON BALZERS AG
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G01 - MEASURING TESTING