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Matthias Wächter
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Jena, DE
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last 30 patents
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Patent Grant
Verification method for repairs on photolithography masks
Patent number
8,515,154
Issue date
Aug 20, 2013
Carl Zeiss SMS GmbH
Thomas Scherübl
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
VERIFICATION METHOD FOR REPAIRS ON PHOTOLITHOGRAPHY MASKS
Publication number
20100254591
Publication date
Oct 7, 2010
CARL ZEISS SMS GMBH
Thomas Scherübl
G01 - MEASURING TESTING