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Matthieu Morpain
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Pouilley Les Vignes, FR
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Patents Grants
last 30 patents
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Patent Grant
EUV source
Patent number
7,095,038
Issue date
Aug 22, 2006
Alcatel
Benoit Barthod
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
EUV source
Publication number
20050072942
Publication date
Apr 7, 2005
ALCATEL
Benoit Barthod
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR