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Matti MALILA

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  • Espoo, FI
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    AN ATOMIC LAYER DEPOSITION APPARATUS AND METHOD
    • Publication number 20240352582
    • Publication date Oct 24, 2024
    • BENEQ OY
    • Markus BOSUND
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AN ATOMIC LAYER DEPOSITION APPARATUS AND AN ARRANGEMENT
    • Publication number 20240337019
    • Publication date Oct 10, 2024
    • BENEQ OY
    • Olli-Pekka SUHONEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHOD FOR ATOMIC LAYER DEPOSITION (ALD)
    • Publication number 20220275512
    • Publication date Sep 1, 2022
    • BENEQ OY
    • Matti MALILA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR SUPPLY CHAMBER
    • Publication number 20220220614
    • Publication date Jul 14, 2022
    • BENEQ OY
    • Johannes WESSLIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR SUPPLY CABINET
    • Publication number 20220146051
    • Publication date May 12, 2022
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS DISTRIBUTION UNIT IN CONNECTION WITH ALD REACTOR
    • Publication number 20220145462
    • Publication date May 12, 2022
    • BENEQ OY
    • Matti MALILA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...