Maureen K. Petterson

Person

Salem, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Extreme edge uniformity control
- Patent number 11,574,800
- Issue date Feb 7, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for selective deposition using angled ions
- Patent number 11,053,580
- Issue date Jul 6, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Extreme edge uniformity control
- Patent number 10,665,433
- Issue date May 26, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple patterning approach using ion implantation
- Patent number 10,310,379
- Issue date Jun 4, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion-assisted deposition and implantation of photoresist to improve...
- Patent number 9,885,957
- Issue date Feb 6, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Maureen K. Petterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ion implantation for improved contact hole critical dimension unifo...
- Patent number 9,735,013
- Issue date Aug 15, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion-assisted deposition and implantation of photoresist to improve...
- Patent number 9,659,784
- Issue date May 23, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Maureen K. Petterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation for improved etch performance
- Patent number 9,520,290
- Issue date Dec 13, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple exposure treatment for processing a patterning feature
- Patent number 9,512,517
- Issue date Dec 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Extreme Edge Uniformity Control
- Publication number 20200243308
- Publication date Jul 30, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR SELECTIVE DEPOSITION USING ANGLED IONS
- Publication number 20190256966
- Publication date Aug 22, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE PATTERNING APPROACH USING ION IMPLANTATION
- Publication number 20180204719
- Publication date Jul 19, 2018
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extreme Edge Uniformity Control
- Publication number 20180082824
- Publication date Mar 22, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION-ASSISTED DEPOSITION AND IMPLANTATION OF PHOTORESIST TO IMPROVE...
- Publication number 20170219926
- Publication date Aug 3, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Maureen K. Petterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION FOR IMPROVED CONTACT HOLE CRITICAL DIMENSION UNIFO...
- Publication number 20170178911
- Publication date Jun 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE EXPOSURE TREATMENT FOR PROCESSING A PATTERNING FEATURE
- Publication number 20160215385
- Publication date Jul 28, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Maureen K. Petterson

Person

Patents Grantslast 30 patents

Extreme edge uniformity control

Techniques for selective deposition using angled ions

Extreme edge uniformity control

Multiple patterning approach using ion implantation

Ion-assisted deposition and implantation of photoresist to improve...

Ion implantation for improved contact hole critical dimension unifo...

Ion-assisted deposition and implantation of photoresist to improve...

Ion implantation for improved etch performance

Multiple exposure treatment for processing a patterning feature

Patents Applicationslast 30 patents

Extreme Edge Uniformity Control

TECHNIQUES FOR SELECTIVE DEPOSITION USING ANGLED IONS

MULTIPLE PATTERNING APPROACH USING ION IMPLANTATION

Extreme Edge Uniformity Control

ION-ASSISTED DEPOSITION AND IMPLANTATION OF PHOTORESIST TO IMPROVE...

ION IMPLANTATION FOR IMPROVED CONTACT HOLE CRITICAL DIMENSION UNIFO...

MULTIPLE EXPOSURE TREATMENT FOR PROCESSING A PATTERNING FEATURE