MAURICE E. EWERT

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Off-angled heating of the underside of a substrate using a lamp ass...
- Patent number 9,863,038
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Maurice E. Ewert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Off-angled heating of the underside of a substrate using a lamp ass...
- Patent number 9,818,587
- Issue date Nov 14, 2017
- Applied Materials, Inc.
- Maurice E. Ewert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for ultra-uniform sputter deposition using simultaneous RF a...
- Patent number 8,992,741
- Issue date Mar 31, 2015
- Applied Materials, Inc.
- Rongjun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanism for continuously varying radial position of a magnetron
- Patent number 8,685,215
- Issue date Apr 1, 2014
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Off-angled heating of the underside of a substrate using a lamp ass...
- Patent number 8,404,048
- Issue date Mar 26, 2013
- Applied Materials, Inc.
- Maurice E. Ewert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron having continuously variable radial position
- Patent number 7,736,473
- Issue date Jun 15, 2010
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selectable dual position magnetron
- Patent number 7,018,515
- Issue date Mar 28, 2006
- Applied Materials, Inc.
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COOLED REFLECTIVE ADAPTER PLATE FOR A DEPOSITION CHAMBER
- Publication number 20130284096
- Publication date Oct 31, 2013
- Ashish GOEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...
- Publication number 20130270107
- Publication date Oct 17, 2013
- APPLIED MATERIALS, INC.
- MAURICE E. EWERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...
- Publication number 20130196514
- Publication date Aug 1, 2013
- Applied Materials, Inc.
- Maurice E. EWERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...
- Publication number 20120231633
- Publication date Sep 13, 2012
- Applied Materials, Inc.
- Maurice E. Ewert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mechanism for continuously varying radial position of a magnetron
- Publication number 20100243440
- Publication date Sep 30, 2010
- APPLIED MATERIALS, INCORPORATED
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ULTRA-UNIFORM SPUTTER DEPOSITION USING SIMULTANEOUS RF A...
- Publication number 20100032289
- Publication date Feb 11, 2010
- Applied Materials, Inc.
- RONGJUN WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR UNIFORM DEPOSITION
- Publication number 20090308732
- Publication date Dec 17, 2009
- Applied Materials, Inc.
- Yong Cao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING DEPOSITION SHIELDING COMPONENTS
- Publication number 20090308739
- Publication date Dec 17, 2009
- Applied Materials, Inc.
- Martin Lee Riker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetron having continuously variable radial position
- Publication number 20060076232
- Publication date Apr 13, 2006
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selectable dual position magnetron
- Publication number 20050211548
- Publication date Sep 29, 2005
- Tza-Jing Gung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

MAURICE E. EWERT

Person

Patents Grantslast 30 patents

Off-angled heating of the underside of a substrate using a lamp ass...

Off-angled heating of the underside of a substrate using a lamp ass...

Method for ultra-uniform sputter deposition using simultaneous RF a...

Mechanism for continuously varying radial position of a magnetron

Off-angled heating of the underside of a substrate using a lamp ass...

Magnetron having continuously variable radial position

Selectable dual position magnetron

Patents Applicationslast 30 patents

COOLED REFLECTIVE ADAPTER PLATE FOR A DEPOSITION CHAMBER

OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...

OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...

OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...

Mechanism for continuously varying radial position of a magnetron

METHOD FOR ULTRA-UNIFORM SPUTTER DEPOSITION USING SIMULTANEOUS RF A...

APPARATUS AND METHOD FOR UNIFORM DEPOSITION

WAFER PROCESSING DEPOSITION SHIELDING COMPONENTS

Magnetron having continuously variable radial position

Selectable dual position magnetron