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Maurice Henricus Franciscus Janssen
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Eindhoven, NL
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last 30 patents
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Patent Grant
Method for predicting a critical dimension of a feature imaged by a...
Patent number
7,443,486
Issue date
Oct 28, 2008
ASML Netherlands B.V.
Koen Van Ingen Schenau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,199,861
Issue date
Apr 3, 2007
ASML Netherlands B.V.
Maurice Henricus Franciscus Janssen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithography measurements using scatterometry
Publication number
20060192936
Publication date
Aug 31, 2006
ASML NETHERLANDS B.V.
Koen Van Ingen Schenau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY