Maurice Henricus Franciscus Janssen

Person

  • Eindhoven, NL

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Lithography measurements using scatterometry

    • Publication number 20060192936
    • Publication date Aug 31, 2006
    • ASML NETHERLANDS B.V.
    • Koen Van Ingen Schenau
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY