Maurits Van Der Schaar

Person

Veldhoven, NL

People

Patents Applicationslast 30 patents

Information Patent Application
Method of measuring the overlay error, an inspection apparatus and...
- Publication number 20090073448
- Publication date Mar 19, 2009
- ASML NETHERLANDS B.V.
- Manfred Gawein Tenner
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus, lithographic apparatus, lithograph...
- Publication number 20080311344
- Publication date Dec 18, 2008
- ASML NETHERLANDS B.V.
- Antoine Gaston Marie Kiers
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus, lithographic apparatus, lithograph...
- Publication number 20080218767
- Publication date Sep 11, 2008
- ASML NETHERLANDS B.V.
- Everhardus Cornelis Mos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of inspection, a method of manufacturing, an inspection appa...
- Publication number 20080212097
- Publication date Sep 4, 2008
- ASML NETHERLANDS B.V.
- Everhardus Cornelis Mos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Marker structure for optical alignment of a substrate, a substrate...
- Publication number 20080180668
- Publication date Jul 31, 2008
- ASML NETHERLANDS B.V.
- Richard Johannes Franciscus Van Haren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of measurement, an inspection apparatus and a lithographic a...
- Publication number 20080144036
- Publication date Jun 19, 2008
- ASML NETHERLANDS B.V.
- Maurits Van Der Schaar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
- Publication number 20080074666
- Publication date Mar 27, 2008
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection apparatus, an apparatus for projecting an image and a me...
- Publication number 20080068609
- Publication date Mar 20, 2008
- ASML NETHERLANDS B.V.
- Roy Werkman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
- Publication number 20080043239
- Publication date Feb 21, 2008
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
- Publication number 20080036984
- Publication date Feb 14, 2008
- ASML NETHERLANDS B.V.
- Everhardus Cornelis Mos
- G01 - MEASURING TESTING

Maurits Van Der Schaar

Person

Patents Applicationslast 30 patents

Method of measuring the overlay error, an inspection apparatus and...

Inspection method and apparatus, lithographic apparatus, lithograph...

Inspection method and apparatus, lithographic apparatus, lithograph...

Method of inspection, a method of manufacturing, an inspection appa...

Marker structure for optical alignment of a substrate, a substrate...

Method of measurement, an inspection apparatus and a lithographic a...

Method and apparatus for angular-resolved spectroscopic lithography...

Inspection apparatus, an apparatus for projecting an image and a me...

Method and apparatus for angular-resolved spectroscopic lithography...

Method and apparatus for angular-resolved spectroscopic lithography...