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Mavis J. Chaboya
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San Jose, CA, US
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last 30 patents
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Patent Grant
Etch back process approach in dual source plasma reactors
Patent number
7,160,813
Issue date
Jan 9, 2007
Novellus Systems, Inc.
Cindy W. Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...