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Max Haider
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Gaiberg, DE
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Patents Grants
last 30 patents
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Patent Grant
Beam guiding arrangement, imaging method, electron microscopy syste...
Patent number
7,135,677
Issue date
Nov 14, 2006
Carl Zeiss NTS GmbH
Oliver Kienzle
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Examining system for the particle-optical imaging of an object, def...
Patent number
6,903,337
Issue date
Jun 7, 2005
Carl Zeiss SMT AG
Oliver Kienzle
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Beam guiding arrangement, imaging method, electron microscopy syste...
Publication number
20040084621
Publication date
May 6, 2004
LEO Elektronenmikroskopie GmbH
Oliver Kienzle
H01 - BASIC ELECTRIC ELEMENTS