Maxim Aleksandrovich NASALEVICH

Person

  • Eindhoven, NL

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION

    • Publication number 20240302734
    • Publication date Sep 12, 2024
    • ASML NETHERLANDS B.V.
    • Pieter-Jan VAN ZWOL
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FOR EUV LITHOGRAPHY

    • Publication number 20240302736
    • Publication date Sep 12, 2024
    • ASML NETHERLANDS B.V.
    • Dennis DE GRAAF
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE AND PELLICLE ASSEMBLY

    • Publication number 20240027893
    • Publication date Jan 25, 2024
    • ASML NETHERLANDS B.V.
    • David Ferdinand VLES
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MEMBRANE FOR EUV LITHOGRAPHY

    • Publication number 20240004283
    • Publication date Jan 4, 2024
    • ASML NETHERLANDS B.V.
    • Maxim Aleksandrovich Nasalevich
    • G02 - OPTICS
  • Information Patent Application

    METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION

    • Publication number 20230324786
    • Publication date Oct 12, 2023
    • ASML NETHERLANDS B.V.
    • Pieter-Jan VAN ZWOL
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE AND PELLICLE ASSEMBLY

    • Publication number 20220252974
    • Publication date Aug 11, 2022
    • ASML NETHERLANDS B.V.
    • David Ferdinand VLES
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION

    • Publication number 20220187701
    • Publication date Jun 16, 2022
    • ASML NETHERLANDS B.V.
    • Pieter-Jan VAN ZWOL
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE AND PELLICLE ASSEMBLY

    • Publication number 20220121111
    • Publication date Apr 21, 2022
    • ASML NETHERLANDS B.V.
    • David Ferdinand VLES
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FOR EUV LITHOGRAPHY

    • Publication number 20210240070
    • Publication date Aug 5, 2021
    • ASML NETHERLANDS B.V.
    • Dennis DE GRAAF
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PELLICLE AND PELLICLE ASSEMBLY

    • Publication number 20210208500
    • Publication date Jul 8, 2021
    • ASML NETHERLANDS B.V.
    • David Ferdinand VLES
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION

    • Publication number 20210181618
    • Publication date Jun 17, 2021
    • ASML NETHERLANDS B.V.
    • Pieter-Jan VAN ZWOL
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    A LITHOGRAPHIC APPARATUS COMPRISING AN OBJECT WITH AN UPPER LAYER H...

    • Publication number 20210132517
    • Publication date May 6, 2021
    • ASML NETHERLANDS B.V.
    • Andrey NIKIPELOV
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MEMBRANE FOR EUV LITHOGRAPHY

    • Publication number 20210109438
    • Publication date Apr 15, 2021
    • ASML NETHERLANDS B.V.
    • Maxim Aleksandrovich Nasalevich
    • G02 - OPTICS
  • Information Patent Application

    GRAPHENE PELLICLE LITHOGRAPHIC APPARATUS

    • Publication number 20200406244
    • Publication date Dec 31, 2020
    • ASML NETHERLANDS B.V.
    • Evgenia KURGANOVA
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    PELLICLE FRAME AND PELLICLE ASSEMBLY

    • Publication number 20200319546
    • Publication date Oct 8, 2020
    • ASML NETHERLANDS B.V.
    • Anton Wilhelmus DUYS
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    COOLING APPARATUS AND PLASMA-CLEANING STATION FOR COOLING APPARATUS

    • Publication number 20200233319
    • Publication date Jul 23, 2020
    • ASML NETHERLANDS B.V.
    • Adrianus, Hendrik Koevoets
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE AND PELLICLE ASSEMBLY

    • Publication number 20200209736
    • Publication date Jul 2, 2020
    • ASML NETHERLANDS B.V.
    • David Ferdinand VLES
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SIMULTANEOUS DOUBLE-SIDE COATING OF MULTILAYER GRAPHENE PELLICLE BY...

    • Publication number 20200159107
    • Publication date May 21, 2020
    • ASML NETHERLANDS B.V.
    • Evgenia KURGANOVA
    • B82 - NANO-TECHNOLOGY
  • Information Patent Application

    SENSOR MARK AND A METHOD OF MANUFACTURING A SENSOR MARK

    • Publication number 20200064183
    • Publication date Feb 27, 2020
    • ASML NETHERLANDS B.V.
    • Joost André KLUGKIST
    • G01 - MEASURING TESTING
  • Information Patent Application

    PELLICLE AND PELLICLE ASSEMBLY

    • Publication number 20200064731
    • Publication date Feb 27, 2020
    • ASML NETHERLANDS B.V.
    • David Ferdinand VLES
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    A MEMBRANE FOR EUV LITHOGRAPHY

    • Publication number 20190129299
    • Publication date May 2, 2019
    • ASML NETHERLANDS B.V.
    • Maxim Aleksandrovich NASALEVICH
    • G02 - OPTICS
  • Information Patent Application

    METHOD OF MANUFACTURING A PELLICLE FOR A LITHOGRAPHIC APPARATUS, A...

    • Publication number 20190056654
    • Publication date Feb 21, 2019
    • ASML NETHERLANDS B.V.
    • Mária PÉTER
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE AND PELLICLE ASSEMBLY

    • Publication number 20180364561
    • Publication date Dec 20, 2018
    • ASML NETHERLANDS B.V.
    • David Ferdinand VLES
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY