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Maxime D' ALFONSO
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method of measuring asymmetry, inspection apparatus, lithographic s...
Patent number
9,786,044
Issue date
Oct 10, 2017
ASML Netherlands B.V.
Andreas Fuchs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD OF MEASURING ASYMMETRY, INSPECTION APPARATUS, LITHOGRAPHIC S...
Publication number
20160180517
Publication date
Jun 23, 2016
ASML NETHERLANDS B.V.
Andreas FUCHS
G06 - COMPUTING CALCULATING COUNTING