Maximilan A. Biberger

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Scottsdale, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
High pressure compatible vacuum chuck for semiconductor wafer inclu...
- Patent number 6,722,642
- Issue date Apr 20, 2004
- Tokyo Electron Limited
- Thomas R. Sutton
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Phase change based heating element system and method
- Publication number 20060226117
- Publication date Oct 12, 2006
- Ronald T. Bertram
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY