Maximilian Rumler

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Darmstadt, DE

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Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SAMPLE
- Publication number 20230418153
- Publication date Dec 28, 2023
- Carl Zeiss SMT GMBH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MASK REPAIR
- Publication number 20230305386
- Publication date Sep 28, 2023
- Carl Zeiss SMT GMBH
- Christian Felix Hermanns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ETCHING A LITHOGRAPHY MASK
- Publication number 20230185180
- Publication date Jun 15, 2023
- Carl Zeiss SMT GMBH
- Fan Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY