May Yuxiang Wang

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Mixed frequency high temperature nitride CVD process
- Patent number 6,664,202
- Issue date Dec 16, 2003
- Applied Materials Inc.
- Sum-Yee Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MIXED FREQUENCY HIGH TEMPERATURE NITRIDE CVD PROCESS
- Publication number 20030199175
- Publication date Oct 23, 2003
- Applied Materials, Inc.
- Sum-Yee Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...