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Maya Angelova Doytcheva
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Alignment target contrast in a lithographic double patterning process
Patent number
8,980,724
Issue date
Mar 17, 2015
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Improving alignment target contrast in a lithographic double patter...
Patent number
8,709,908
Issue date
Apr 29, 2014
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for increasing alignment target contrast
Patent number
8,625,096
Issue date
Jan 7, 2014
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for providing resist alignment marks in a doub...
Patent number
8,329,366
Issue date
Dec 11, 2012
ASML Netherlands B.V.
Maya Angelova Doytcheva
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Marker structure and method of forming the same
Patent number
8,319,967
Issue date
Nov 27, 2012
ASML Netherlands B.V.
Richard Johannes Franciscus Van Haren
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
Alignment Target Contrast in a Lithographic Double Patterning Process
Publication number
20140192333
Publication date
Jul 10, 2014
ASML NETHERLANDS B.V.
Harry SEWELL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MARKER STRUCTURE AND METHOD OF FORMING THE SAME
Publication number
20130070226
Publication date
Mar 21, 2013
ASML NETHERLANDS B.V.
Richard Johannes Franciscus Van Haren
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Apparatus and Method for Providing Resist Alignment Marks in a Doub...
Publication number
20130017378
Publication date
Jan 17, 2013
ASML NETHERLANDS B.V.
Maya Angelova Doytcheva
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Increasing Alignment Target Contrast
Publication number
20110075238
Publication date
Mar 31, 2011
ASML NETHERLANDS B.V.
Harry SEWELL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and Method for Providing Resist Alignment Marks in a Doub...
Publication number
20100323171
Publication date
Dec 23, 2010
ASML Holding N.V.
Maya Angelova DOYTCHEVA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment Target Contrast in a Lithographic Double Patterning Process
Publication number
20100301458
Publication date
Dec 2, 2010
ASML Holding N.V.
Harry Sewell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MARKER STRUCTURE AND METHOD OF FORMING THE SAME
Publication number
20090147232
Publication date
Jun 11, 2009
ASML NETHERLANDS B.V.
Richard Johannes Franciscus Van Haren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Gas discharge lamp with down conversion phosphor
Publication number
20060290258
Publication date
Dec 28, 2006
KONINKLIKE PHILIPS ELECTRONICS, N.V.
Claus Feldmann
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...