Mayasari Lim

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London, GB

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Patents Grantslast 30 patents

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Process modulation to prevent structure erosion during gap fill
- Patent number 7,217,658
- Issue date May 15, 2007
- Novellus Systems, Inc.
- Atiye Bayman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...