Mayuko NAKAMURA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and stage
- Patent number 11,915,964
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Yuichiro Wagatsuma
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20230094053
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Yuichiro WAGATSUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING SILICON FILM ON SUBSTRATE HAVING FINE PATTERN
- Publication number 20220005690
- Publication date Jan 6, 2022
- TOKYO ELECTRON LIMITED
- Yuki TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND STAGE
- Publication number 20210193503
- Publication date Jun 24, 2021
- TOKYO ELECTRON LIMITED
- Yuichiro WAGATSUMA
- H01 - BASIC ELECTRIC ELEMENTS