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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Method for dielectric material removal between conductive lines
Patent number
8,114,780
Issue date
Feb 14, 2012
Lam Research Corporation
Mayumi Block
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer electrical discharge control using argon free dechucking gas
Patent number
7,892,445
Issue date
Feb 22, 2011
Lam Research Corporation
David Wei
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
NITRIDE PLASMA ETCH WITH HIGHLY TUNABLE SELECTIVITY TO OXIDE
Publication number
20110223770
Publication date
Sep 15, 2011
LAM RESEARCH CORPORATION
Alan Jensen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DIELECTRIC MATERIAL REMOVAL BETWEEN CONDUCTIVE LINES
Publication number
20100248485
Publication date
Sep 30, 2010
LAM RESEARCH CORPORATION
Mayumi Block
H01 - BASIC ELECTRIC ELEMENTS