Mayur G. KULKARNI

Person

Bangalore, IN

People

Patents Grantslast 30 patents

Information Patent Grant
Dynamic processing chamber baffle
- Patent number 12,119,209
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Udit S. Kotagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-pressure bipolar electrostatic chucking
- Patent number 12,040,210
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate with localized flow control
- Patent number 12,020,907
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Arun Thottappayil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low impedance current path for edge non-uniformity tuning
- Patent number 11,929,278
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mesa height modulation for thickness correction
- Patent number 11,869,795
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Saketh Pemmasani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit for a high throughput processing chamber
- Patent number 11,512,391
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Kalyanjit Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced lift pin design to eliminate local thickness non-uniformit...
- Patent number 11,508,611
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Kalyanjit Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit for a high throughput processing chamber
- Patent number 10,724,138
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Kalyanjit Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for high temperature clean
- Patent number 10,612,135
- Issue date Apr 7, 2020
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for substrate processing chambers
- Patent number 10,600,624
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- Kalyanjit Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced lift pin design to eliminate local thickness non-uniformit...
- Patent number 10,490,436
- Issue date Nov 26, 2019
- Applied Materials, Inc.
- Kalyanjit Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Application of bottom purge to increase clean efficiency
- Patent number 10,312,076
- Issue date Jun 4, 2019
- Applied Materials, Inc.
- Kalyanjit Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ADAPTIVE WAFER BOW MANAGEMENT
- Publication number 20250069959
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Mayur Govind Kulkarni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS STACK FOR CVD PLASMA TREATMENT
- Publication number 20250037976
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Anirudh K. Alewoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHAPED FACEPLATE FOR EXTREME EDGE FILM UNIFORMITY
- Publication number 20250029849
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Anish Janakiraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR CONTROLLING SUBSTRATE TEMPERATURE DURING...
- Publication number 20240312770
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Jian LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR PRECURSOR DELIVERY AND SPLITTING FOR FAST SWITCHING
- Publication number 20240234167
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Shashank Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTION TREATMENTS FOR SURFACES OF SEMICONDUCTOR FABRICATION EQU...
- Publication number 20240153745
- Publication date May 9, 2024
- Applied Materials, Inc.
- Katherine Woo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC PROCESSING CHAMBER BAFFLE
- Publication number 20230114104
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Udit S. Kotagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC PROCESSING CHAMBER BAFFLE
- Publication number 20230113063
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Udit S. Kotagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHAPED SHOWERHEAD FOR EDGE PLASMA MODULATION
- Publication number 20230011938
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Saketh Pemmasani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MESA HEIGHT MODULATION FOR THICKNESS CORRECTION
- Publication number 20230008922
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Saketh Pemmasani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW IMPEDANCE CURRENT PATH FOR EDGE NON-UNIFORMITY TUNING
- Publication number 20220375776
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATOR FOR PROCESSING CHAMBERS
- Publication number 20220328293
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Akshay Dhanakshirur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH HEAT LOSS HEATER AND ELECTROSTATIC CHUCK FOR SEMICONDUCTOR PRO...
- Publication number 20220127723
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PRESSURE BIPOLAR ELECTROSTATIC CHUCKING
- Publication number 20220122873
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRIC ARC MITIGATING FACEPLATE
- Publication number 20220122811
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER NON-UNIFORMITY TWEAKING THROUGH LOCALIZED ION ENHANCED PLASMA...
- Publication number 20220093368
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Saketh Pemmasani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASYMMETRIC EXHAUST PUMPING PLATE DESIGN FOR A SEMICONDUCTOR PROCESS...
- Publication number 20210388495
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Akshay Gunaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACEPLATE WITH LOCALIZED FLOW CONTROL
- Publication number 20210319981
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Arun Thottappayil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT FOR A HIGH THROUGHPUT PROCESSING CHAMBER
- Publication number 20200325577
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Kalyanjit GHOSH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED LIFT PIN DESIGN TO ELIMINATE LOCAL THICKNESS NON-UNIFORMIT...
- Publication number 20200058538
- Publication date Feb 20, 2020
- Applied Materials, Inc.
- Kalyanjit GHOSH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR SUPPRESSING PARASITIC PLASMA IN PLASMA ENHANCED CHEMI...
- Publication number 20190378696
- Publication date Dec 12, 2019
- Applied Materials, Inc.
- Sai Susmita ADDEPALLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIZONE GAS DISTRIBUTION APPARATUS
- Publication number 20190311887
- Publication date Oct 10, 2019
- Applied Materials, Inc.
- Akshay GUNAJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20190122872
- Publication date Apr 25, 2019
- Applied Materials, Inc.
- Kalyanjit GHOSH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT FOR A HIGH THROUGHPUT PROCESSING CHAMBER
- Publication number 20180274095
- Publication date Sep 27, 2018
- Applied Materials, Inc.
- Kalyanjit GHOSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOVEL APPLICATION OF BOTTOM PURGE TO INCREASE CLEAN EFFICIENCY
- Publication number 20180261453
- Publication date Sep 13, 2018
- Applied Materials, Inc.
- Kalyanjit GHOSH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A METHOD AND SYSTEM FOR HIGH TEMPERATURE CLEAN
- Publication number 20180023193
- Publication date Jan 25, 2018
- Applied Materials, Inc.
- Sanjeev BALUJA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED LIFT PIN DESIGN TO ELIMINATE LOCAL THICKNESS NON-UNIFORMIT...
- Publication number 20170125280
- Publication date May 4, 2017
- Applied Materials, Inc.
- Kalyanjit GHOSH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mayur G. KULKARNI

Person

Patents Grantslast 30 patents

Dynamic processing chamber baffle

Multi-pressure bipolar electrostatic chucking

Faceplate with localized flow control

Low impedance current path for edge non-uniformity tuning

Mesa height modulation for thickness correction

Process kit for a high throughput processing chamber

Enhanced lift pin design to eliminate local thickness non-uniformit...

Process kit for a high throughput processing chamber

Method and system for high temperature clean

System and method for substrate processing chambers

Enhanced lift pin design to eliminate local thickness non-uniformit...

Application of bottom purge to increase clean efficiency

Patents Applicationslast 30 patents

ADAPTIVE WAFER BOW MANAGEMENT

PROCESS STACK FOR CVD PLASMA TREATMENT

SHAPED FACEPLATE FOR EXTREME EDGE FILM UNIFORMITY

APPARATUS AND METHODS FOR CONTROLLING SUBSTRATE TEMPERATURE DURING...

MODULAR PRECURSOR DELIVERY AND SPLITTING FOR FAST SWITCHING

PROTECTION TREATMENTS FOR SURFACES OF SEMICONDUCTOR FABRICATION EQU...

DYNAMIC PROCESSING CHAMBER BAFFLE

DYNAMIC PROCESSING CHAMBER BAFFLE

SHAPED SHOWERHEAD FOR EDGE PLASMA MODULATION

MESA HEIGHT MODULATION FOR THICKNESS CORRECTION

LOW IMPEDANCE CURRENT PATH FOR EDGE NON-UNIFORMITY TUNING

ISOLATOR FOR PROCESSING CHAMBERS

HIGH HEAT LOSS HEATER AND ELECTROSTATIC CHUCK FOR SEMICONDUCTOR PRO...

MULTI-PRESSURE BIPOLAR ELECTROSTATIC CHUCKING

ELECTRIC ARC MITIGATING FACEPLATE

WAFER NON-UNIFORMITY TWEAKING THROUGH LOCALIZED ION ENHANCED PLASMA...

ASYMMETRIC EXHAUST PUMPING PLATE DESIGN FOR A SEMICONDUCTOR PROCESS...

FACEPLATE WITH LOCALIZED FLOW CONTROL

PROCESS KIT FOR A HIGH THROUGHPUT PROCESSING CHAMBER

ENHANCED LIFT PIN DESIGN TO ELIMINATE LOCAL THICKNESS NON-UNIFORMIT...

APPARATUS FOR SUPPRESSING PARASITIC PLASMA IN PLASMA ENHANCED CHEMI...

MULTIZONE GAS DISTRIBUTION APPARATUS

SYSTEM AND METHOD FOR SUBSTRATE PROCESSING CHAMBERS

PROCESS KIT FOR A HIGH THROUGHPUT PROCESSING CHAMBER

NOVEL APPLICATION OF BOTTOM PURGE TO INCREASE CLEAN EFFICIENCY

A METHOD AND SYSTEM FOR HIGH TEMPERATURE CLEAN

ENHANCED LIFT PIN DESIGN TO ELIMINATE LOCAL THICKNESS NON-UNIFORMIT...