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Gap fill for high aspect ratio structures
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Patent number 7,067,440
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Issue date Jun 27, 2006
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Novellus Systems, Inc.
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Atiye Bayman
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Gap fill for high aspect ratio structures
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Patent number 6,787,483
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Issue date Sep 7, 2004
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Novellus Systems, Inc.
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Atiye Bayman
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Gap fill for high aspect ratio structures
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Patent number 6,596,654
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Issue date Jul 22, 2003
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Novellus Systems, Inc.
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Atiye Bayman
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...