Meenakshi Mamunuru

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Tigard, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing systems including gas delivery system with red...
- Patent number 11,959,172
- Issue date Apr 16, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing systems including gas delivery system with red...
- Patent number 11,661,654
- Issue date May 30, 2023
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR RADIO FREQUENCY GRID DESIGN IN AN ESC TO R...
- Publication number 20250038034
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH RED...
- Publication number 20230279548
- Publication date Sep 7, 2023
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH RED...
- Publication number 20190323125
- Publication date Oct 24, 2019
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...