Meenakshisundaram Gandhi

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition of silicon and silicon-containing films
- Patent number 8,012,859
- Issue date Sep 6, 2011
- Tokyo Electron Limited
- Raymond Joe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalyst-assisted atomic layer deposition of silicon-containing fil...
- Patent number 7,964,441
- Issue date Jun 21, 2011
- Tokyo Electron Limited
- Raymond Joe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing system with improved process gas flow and method...
- Patent number 7,632,354
- Issue date Dec 15, 2009
- Tokyo Electron Limited
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CATALYST-ASSISTED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FIL...
- Publication number 20080241358
- Publication date Oct 2, 2008
- TOKYO ELECTON LIMITED
- Raymond Joe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL PROCESSING SYSTEM WITH IMPROVED PROCESS GAS FLOW AND METHOD...
- Publication number 20080035055
- Publication date Feb 14, 2008
- TOKYO ELECTRON LIMITED
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...