Megan WOOLEY

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Virtual metrology for wafer result prediction
- Patent number 12,112,107
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Jun Shinagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and process using fingerprint based semiconductor manufactur...
- Patent number 11,868,119
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Nathan Ip
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Virtual metrology enhanced plasma process optimization method
- Patent number 11,869,756
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Jun Shinagawa
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Method And Process Using Fingerprint Based Semiconductor Manufactur...
- Publication number 20230102438
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Nathan Ip
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VIRTUAL METROLOGY ENHANCED PLASMA PROCESS OPTIMIZATION METHOD
- Publication number 20220406580
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Jun SHINAGAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VIRTUAL METROLOGY FOR WAFER RESULT PREDICTION
- Publication number 20220092242
- Publication date Mar 24, 2022
- TOKYO ELECTRON LIMITED
- Jun SHINAGAWA
- G06 - COMPUTING CALCULATING COUNTING