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Megha Rathod
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San Jose, CA, US
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last 30 patents
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Patent Grant
Selective deposition of WCN barrier/adhesion layer for interconnect
Patent number
10,283,404
Issue date
May 7, 2019
Lam Research Corporation
Jeong-Seok Na
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SELECTIVE DEPOSITION OF WCN BARRIER/ADHESION LAYER FOR INTERCONNECT
Publication number
20180286746
Publication date
Oct 4, 2018
LAM RESEARCH CORPORATION
Jeong-Seok Na
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR FORMING FLOWABLE DIELECTRIC FILMS HAVING...
Publication number
20150118863
Publication date
Apr 30, 2015
LAM RESEARCH CORPORATION
Megha Rathod
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BOTTOM UP FILL IN HIGH ASPECT RATIO TRENCHES
Publication number
20120149213
Publication date
Jun 14, 2012
Lakshminarayana Nittala
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...