Megumi KIMURA

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam observation device, electron beam observation system,...
- Patent number 11,791,130
- Issue date Oct 17, 2023
- HITACHI HIGH-TECH CORPORATION
- Koichi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam observation device, electron beam observation system,...
- Patent number 11,170,969
- Issue date Nov 9, 2021
- HITACHI HIGH-TECH CORPORATION
- Koichi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device and sample inspection method
- Patent number 10,629,405
- Issue date Apr 21, 2020
- Hitachi, Ltd.
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,319,562
- Issue date Jun 11, 2019
- Hitachi, Ltd.
- Megumi Kimura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electron Beam Observation Device, Electron Beam Observation System,...
- Publication number 20220051868
- Publication date Feb 17, 2022
- Hitachi High-Tech Corporation
- Koichi HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM OBSERVATION DEVICE, ELECTRON BEAM OBSERVATION SYSTEM,...
- Publication number 20210125806
- Publication date Apr 29, 2021
- Hitachi High-Technologies Corporation
- Koichi HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE AND SAMPLE INSPECTION METHOD
- Publication number 20190287757
- Publication date Sep 19, 2019
- Hitachi, Ltd
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20180261426
- Publication date Sep 13, 2018
- Hitachi, Ltd
- Megumi KIMURA
- H01 - BASIC ELECTRIC ELEMENTS