TREA

Megumu Saitou

Follow

Person

  • Shunan, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 9,805,915
    • Issue date Oct 31, 2017
    • Hitachi High-Technologies Corporation
    • Masaharu Gushiken
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20120145322
    • Publication date Jun 14, 2012
    • Hitachi High-Technologies Corporation
    • Masaharu GUSHIKEN
    • H01 - BASIC ELECTRIC ELEMENTS