Mehmet A. Akbas

Person

Cheshire, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method to manufacture nano ridges in hard ceramic coatings
- Patent number 12,111,581
- Issue date Oct 8, 2024
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus, substrate table, and non-uniform coating me...
- Patent number 11,887,881
- Issue date Jan 30, 2024
- ASML Holding N.V.
- Bruce Tirri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holder for use in a lithographic apparatus
- Patent number 11,448,976
- Issue date Sep 20, 2022
- ASML Netherlands B.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Burls with altered surface topography for holding an object in lith...
- Patent number 11,270,906
- Issue date Mar 8, 2022
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder and a method of manufacturing a substrate holder
- Patent number 10,719,019
- Issue date Jul 21, 2020
- ASML Holding N.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20240369947
- Publication date Nov 7, 2024
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR MANUFACTURING A DOUBLE-SIDED ELECTROSTATIC...
- Publication number 20230021360
- Publication date Jan 26, 2023
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS
- Publication number 20220357675
- Publication date Nov 10, 2022
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING ME...
- Publication number 20220216092
- Publication date Jul 7, 2022
- ASML Holding N.V.
- Bruce TIRRI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LASER ROUGHENING: ENGINEERING THE ROUGHNESS OF THE BURL TOP
- Publication number 20220134480
- Publication date May 5, 2022
- ASML Holding N.V.
- Damoon SOHRABIBABAHEIDARY
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
A METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20210405539
- Publication date Dec 30, 2021
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BURLS WITH ALTERED SURFACE TOPOGRAPHY FOR HOLDING AN OBJECT IN LITH...
- Publication number 20210202293
- Publication date Jul 1, 2021
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS
- Publication number 20210165334
- Publication date Jun 3, 2021
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
- Publication number 20190332015
- Publication date Oct 31, 2019
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20110221145
- Publication date Sep 15, 2011
- Mehmet A. Akbas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mehmet A. Akbas

Person

Patents Grantslast 30 patents

Method to manufacture nano ridges in hard ceramic coatings

Lithographic apparatus, substrate table, and non-uniform coating me...

Substrate holder for use in a lithographic apparatus

Burls with altered surface topography for holding an object in lith...

Substrate holder and a method of manufacturing a substrate holder

Patents Applicationslast 30 patents

METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS

SYSTEMS AND METHODS FOR MANUFACTURING A DOUBLE-SIDED ELECTROSTATIC...

SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING ME...

LASER ROUGHENING: ENGINEERING THE ROUGHNESS OF THE BURL TOP

A METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS

BURLS WITH ALTERED SURFACE TOPOGRAPHY FOR HOLDING AN OBJECT IN LITH...

SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS

A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER

ELECTROSTATIC CHUCK