Mehmet Derya Tetiker

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 11,704,463
- Issue date Jul 18, 2023
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 10,997,345
- Issue date May 4, 2021
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 10,572,697
- Issue date Feb 25, 2020
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Layout pattern proximity correction through edge placement error pr...
- Patent number 10,534,257
- Issue date Jan 14, 2020
- Lam Research Corporation
- Mehmet Derya Tetiker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatuses for etch profile matching by surface kineti...
- Patent number 10,386,828
- Issue date Aug 20, 2019
- Lam Research Corporation
- Mehmet Derya Tetiker
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and apparatuses for etch profile optimization by reflectanc...
- Patent number 10,303,830
- Issue date May 28, 2019
- Lam Research Corporation
- Mehmet Derya Tetiker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Layout pattern proximity correction through fast edge placement err...
- Patent number 10,254,641
- Issue date Apr 9, 2019
- Lam Research Corporation
- Julien Mailfert
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for detecting a process point in multi-mode pulse...
- Patent number 10,242,849
- Issue date Mar 26, 2019
- Lam Research Corporation
- Yassine Kabouzi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch metric sensitivity for endpoint detection
- Patent number 10,032,681
- Issue date Jul 24, 2018
- Lam Research Corporation
- Andrew D. Bailey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatuses for etch profile optimization by reflectanc...
- Patent number 9,996,647
- Issue date Jun 12, 2018
- Lam Research Corporation
- Mehmet Derya Tetiker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatuses for etch profile optimization by reflectanc...
- Patent number 9,792,393
- Issue date Oct 17, 2017
- Lam Research Corporation
- Mehmet Derya Tetiker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for detecting a process point in multi-mode pulse...
- Patent number 9,640,371
- Issue date May 2, 2017
- Lam Research Corporation
- Yassine Kabouzi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MATCHING PRE-PROCESSING AND POST-PROCESSING SUBSTRATE SAMPLES
- Publication number 20240112961
- Publication date Apr 4, 2024
- LAM RESEARCH CORPORATION
- Yu Lu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20210216695
- Publication date Jul 15, 2021
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20200218844
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20190311083
- Publication date Oct 10, 2019
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...
- Publication number 20190049937
- Publication date Feb 14, 2019
- LAM RESEARCH CORPORATION
- Mehmet Derya Tetiker
- G05 - CONTROLLING REGULATING
Information Patent Application
DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH EDGE PLACEMENT E...
- Publication number 20180314148
- Publication date Nov 1, 2018
- LAM RESEARCH CORPORATION
- Mehmet Derya Tetiker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...
- Publication number 20180260509
- Publication date Sep 13, 2018
- Lam Research Corporation
- Mehmet Derya Tetiker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST EDGE PLACEM...
- Publication number 20180157161
- Publication date Jun 7, 2018
- LAM RESEARCH CORPORATION
- Julien Mailfert
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...
- Publication number 20170371991
- Publication date Dec 28, 2017
- LAM RESEARCH CORPORATION
- Mehmet Derya Tetiker
- G01 - MEASURING TESTING
Information Patent Application
ETCH METRIC SENSITIVITY FOR ENDPOINT DETECTION
- Publication number 20170256463
- Publication date Sep 7, 2017
- LAM RESEARCH CORPORATION
- Andrew D. Bailey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...
- Publication number 20170228482
- Publication date Aug 10, 2017
- LAM RESEARCH CORPORATION
- Mehmet Derya Tetiker
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DETECTING A PROCESS POINT IN MULT-MODE PULSE...
- Publication number 20170207070
- Publication date Jul 20, 2017
- LAM RESEARCH CORPORATION
- Yassine Kabouzi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE MATCHING BY SURFACE KINETI...
- Publication number 20170176983
- Publication date Jun 22, 2017
- LAM RESEARCH CORPORATION
- Mehmet Derya Tetiker
- G05 - CONTROLLING REGULATING
Information Patent Application
System and Method for Detecting a Process Point in Multi-Mode Pulse...
- Publication number 20160111261
- Publication date Apr 21, 2016
- LAM RESEARCH CORPORATION
- Yassine Kabouzi
- H01 - BASIC ELECTRIC ELEMENTS

Mehmet Derya Tetiker

Person

Patents Grantslast 30 patents

Method of etch model calibration using optical scatterometry

Method of etch model calibration using optical scatterometry

Method of etch model calibration using optical scatterometry

Layout pattern proximity correction through edge placement error pr...

Methods and apparatuses for etch profile matching by surface kineti...

Methods and apparatuses for etch profile optimization by reflectanc...

Layout pattern proximity correction through fast edge placement err...

System and method for detecting a process point in multi-mode pulse...

Etch metric sensitivity for endpoint detection

Methods and apparatuses for etch profile optimization by reflectanc...

Methods and apparatuses for etch profile optimization by reflectanc...

System and method for detecting a process point in multi-mode pulse...

Patents Applicationslast 30 patents

MATCHING PRE-PROCESSING AND POST-PROCESSING SUBSTRATE SAMPLES

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...

DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH EDGE PLACEMENT E...

METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...

DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST EDGE PLACEM...

METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...

ETCH METRIC SENSITIVITY FOR ENDPOINT DETECTION

METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...

SYSTEM AND METHOD FOR DETECTING A PROCESS POINT IN MULT-MODE PULSE...

METHODS AND APPARATUSES FOR ETCH PROFILE MATCHING BY SURFACE KINETI...

System and Method for Detecting a Process Point in Multi-Mode Pulse...