Mehmet Tugrul SAMIR

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-zone semiconductor substrate supports
- Patent number 11,915,950
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing chamber multistage mixing apparatus
- Patent number 11,515,179
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing chamber for multiple precursor flow
- Patent number 11,361,939
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chamber for multiple precursor flow
- Patent number 11,276,559
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone semiconductor substrate supports
- Patent number 11,276,590
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liner for epi chamber
- Patent number 11,060,203
- Issue date Jul 13, 2021
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chamber multistage mixing apparatus and me...
- Patent number 10,964,512
- Issue date Mar 30, 2021
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber
- Patent number 10,923,386
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor support
- Patent number 10,837,121
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Richard O. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution showerhead for semiconductor processing
- Patent number 10,829,855
- Issue date Nov 10, 2020
- Applied Materials, Inc.
- Anh N. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batch processing chamber
- Patent number 10,781,533
- Issue date Sep 22, 2020
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inject insert for EPI chamber
- Patent number 10,760,161
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Shu-Kwan Lau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing chamber multistage mixing apparatus
- Patent number 10,699,921
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Semiconductor processing chamber multistage mixing apparatus
- Patent number 10,679,870
- Issue date Jun 9, 2020
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Systems and methods for pedestal configuration
- Patent number 10,672,642
- Issue date Jun 2, 2020
- Applied Materials, Inc.
- Paneendra Prakash Bhat
- G01 - MEASURING TESTING
Information Patent Grant
Gas distribution showerhead for semiconductor processing
- Patent number 10,577,690
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- Anh N. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer mechanisms
- Patent number 10,453,733
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lamp heating for process chamber
- Patent number 10,356,848
- Issue date Jul 16, 2019
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- F26 - DRYING
Information Patent Grant
Flow controlled liner having spatially distributed gas passages
- Patent number 10,170,342
- Issue date Jan 1, 2019
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating modulators to improve epi uniformity tuning
- Patent number 10,132,003
- Issue date Nov 20, 2018
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EPI base ring
- Patent number 10,119,192
- Issue date Nov 6, 2018
- Applied Materials, Inc.
- Steve Aboagye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 10,077,508
- Issue date Sep 18, 2018
- Applied Materials, Inc.
- Joseph M. Ranish
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer mechanisms
- Patent number 9,905,454
- Issue date Feb 27, 2018
- Applied Materials, Inc.
- Masato Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber having separate process gas and purge gas regions
- Patent number 9,870,919
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Joseph M. Ranish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow controlled liner having spatially distributed gas passages
- Patent number 9,842,748
- Issue date Dec 12, 2017
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with surface feature for reduced reflection and m...
- Patent number 9,814,099
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Shu-Kwan Lau
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Quartz upper and lower domes
- Patent number 9,768,043
- Issue date Sep 19, 2017
- Applied Materials, Inc.
- Anzhong Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal coupled quartz dome heat sink
- Patent number 9,748,121
- Issue date Aug 29, 2017
- Applied Materials, Inc.
- Joseph M. Ranish
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liner assembly for chemical vapor deposition chamber
- Patent number 9,695,508
- Issue date Jul 4, 2017
- Applied Materials, Inc.
- David K. Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 9,580,835
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Joseph M. Ranish
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
MULTI-ZONE SEMICONDUCTOR SUBSTRATE SUPPORTS
- Publication number 20220148894
- Publication date May 12, 2022
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH CONDUCTANCE PROCESS KIT
- Publication number 20220084845
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Samartha Subramanya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS
- Publication number 20200328098
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PEDESTAL CONFIGURATION
- Publication number 20200035540
- Publication date Jan 30, 2020
- Applied Materials, Inc.
- Paneendra Prakash Bhat
- G01 - MEASURING TESTING
Information Patent Application
EXTREME UNIFORMITY HEATED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20190371577
- Publication date Dec 5, 2019
- Applied Materials, Inc.
- David BENJAMINSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS
- Publication number 20190333786
- Publication date Oct 31, 2019
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER FOR MULTIPLE PRECURSOR FLOW
- Publication number 20190311883
- Publication date Oct 10, 2019
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS AND ME...
- Publication number 20190252154
- Publication date Aug 15, 2019
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS
- Publication number 20190252216
- Publication date Aug 15, 2019
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MULTI-ZONE SEMICONDUCTOR SUBSTRATE SUPPORTS
- Publication number 20180337074
- Publication date Nov 22, 2018
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER FOR MULTIPLE PRECURSOR FLOW
- Publication number 20180337057
- Publication date Nov 22, 2018
- Applied Materials, Inc.
- Mehmet Tugrul Samir
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPITAXIAL CHAMBER WITH CUSTOMIZABLE FLOW INJECTION
- Publication number 20180209043
- Publication date Jul 26, 2018
- SHU-KWAN LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER MECHANISMS
- Publication number 20180182660
- Publication date Jun 28, 2018
- Applied Materials, Inc.
- Masato ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS
- Publication number 20180138031
- Publication date May 17, 2018
- Applied Materials, Inc.
- Joseph M. RANISH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW CONTROLLED LINER HAVING SPATIALLY DISTRIBUTED GAS PASSAGES
- Publication number 20180033652
- Publication date Feb 1, 2018
- Applied Materials, Inc.
- Mehmet Tugrul SAMIR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING MODULATORS TO IMPROVE EPI UNIFORMITY TUNING
- Publication number 20180023214
- Publication date Jan 25, 2018
- Applied Materials, Inc.
- Shu-Kwan LAU
- C30 - CRYSTAL GROWTH
Information Patent Application
QUARTZ UPPER AND LOWER DOMES
- Publication number 20180005856
- Publication date Jan 4, 2018
- Applied Materials, Inc.
- Anzhong CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL COUPLED QUARTZ DOME HEAT SINK
- Publication number 20170338135
- Publication date Nov 23, 2017
- Applied Materials, Inc.
- Joseph M. RANISH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION SHOWERHEAD FOR SEMICONDUCTOR PROCESSING
- Publication number 20170335457
- Publication date Nov 23, 2017
- Applied Materials, Inc.
- Anh N. NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION SHOWERHEAD FOR SEMICONDUCTOR PROCESSING
- Publication number 20170335456
- Publication date Nov 23, 2017
- Applied Materials, Inc.
- Anh N. NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR SUPPORT
- Publication number 20170275777
- Publication date Sep 28, 2017
- Applied Materials, Inc.
- Richard O. COLLINS
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20170130359
- Publication date May 11, 2017
- Applied Materials, Inc.
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
FLOW CONTROLLED LINER HAVING SPATIALLY DISTRIBUTED GAS PASSAGES
- Publication number 20170125265
- Publication date May 4, 2017
- Applied Materials, Inc.
- Mehmet Tugrul SAMIR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING CHAMBER
- Publication number 20170029976
- Publication date Feb 2, 2017
- Applied Materials, Inc.
- Mehmet Tugrul SAMIR
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESS CHAMBER WITH REFLECTOR
- Publication number 20160348276
- Publication date Dec 1, 2016
- Applied Materials, Inc.
- Shu-Kwan LAU
- C30 - CRYSTAL GROWTH
Information Patent Application
EPI BASE RING
- Publication number 20160230276
- Publication date Aug 11, 2016
- Applied Materials, Inc.
- STEVE ABOAGYE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMP HEATING FOR PROCESS CHAMBER
- Publication number 20160227606
- Publication date Aug 4, 2016
- Applied Materials, Inc.
- Mehmet Tugrul SAMIR
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE TRANSFER MECHANISMS
- Publication number 20160204019
- Publication date Jul 14, 2016
- Applied Materials, Inc.
- Masato ISHII
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESSING CHAMBER
- Publication number 20160197001
- Publication date Jul 7, 2016
- Applied Materials, Inc.
- Mehmet Tugrul SAMIR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20160138188
- Publication date May 19, 2016
- Applied Materials, Inc.
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH

Mehmet Tugrul SAMIR

Person

Patents Grantslast 30 patents

Multi-zone semiconductor substrate supports

Semiconductor processing chamber multistage mixing apparatus

Semiconductor processing chamber for multiple precursor flow

Semiconductor processing chamber for multiple precursor flow

Multi-zone semiconductor substrate supports

Liner for epi chamber

Semiconductor processing chamber multistage mixing apparatus and me...

Processing chamber

Susceptor support

Gas distribution showerhead for semiconductor processing

Batch processing chamber

Inject insert for EPI chamber

Semiconductor processing chamber multistage mixing apparatus

Semiconductor processing chamber multistage mixing apparatus

Systems and methods for pedestal configuration

Gas distribution showerhead for semiconductor processing

Substrate transfer mechanisms

Lamp heating for process chamber

Flow controlled liner having spatially distributed gas passages

Heating modulators to improve epi uniformity tuning

EPI base ring

Multizone control of lamps in a conical lamphead using pyrometers

Substrate transfer mechanisms

Process chamber having separate process gas and purge gas regions

Flow controlled liner having spatially distributed gas passages

Substrate support with surface feature for reduced reflection and m...

Quartz upper and lower domes

Thermal coupled quartz dome heat sink

Liner assembly for chemical vapor deposition chamber

Multizone control of lamps in a conical lamphead using pyrometers

Patents Applicationslast 30 patents

MULTI-ZONE SEMICONDUCTOR SUBSTRATE SUPPORTS

HIGH CONDUCTANCE PROCESS KIT

SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS

SYSTEMS AND METHODS FOR PEDESTAL CONFIGURATION

EXTREME UNIFORMITY HEATED SUBSTRATE SUPPORT ASSEMBLY

SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS

SEMICONDUCTOR PROCESSING CHAMBER FOR MULTIPLE PRECURSOR FLOW

SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS AND ME...

SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS

MULTI-ZONE SEMICONDUCTOR SUBSTRATE SUPPORTS

SEMICONDUCTOR PROCESSING CHAMBER FOR MULTIPLE PRECURSOR FLOW

EPITAXIAL CHAMBER WITH CUSTOMIZABLE FLOW INJECTION

SUBSTRATE TRANSFER MECHANISMS

PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS

FLOW CONTROLLED LINER HAVING SPATIALLY DISTRIBUTED GAS PASSAGES

HEATING MODULATORS TO IMPROVE EPI UNIFORMITY TUNING

QUARTZ UPPER AND LOWER DOMES

THERMAL COUPLED QUARTZ DOME HEAT SINK

GAS DISTRIBUTION SHOWERHEAD FOR SEMICONDUCTOR PROCESSING

GAS DISTRIBUTION SHOWERHEAD FOR SEMICONDUCTOR PROCESSING

SUSCEPTOR SUPPORT

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

FLOW CONTROLLED LINER HAVING SPATIALLY DISTRIBUTED GAS PASSAGES

BATCH PROCESSING CHAMBER

PROCESS CHAMBER WITH REFLECTOR

EPI BASE RING

LAMP HEATING FOR PROCESS CHAMBER

SUBSTRATE TRANSFER MECHANISMS

PROCESSING CHAMBER

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS