Mehran Behdjat

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum chuck pressure control system
- Patent number 11,694,919
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Dongming Iu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Graphite susceptor
- Patent number 11,021,794
- Issue date Jun 1, 2021
- Applied Materials, Inc.
- Preetham Rao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-contact temperature calibration tool for a substrate support an...
- Patent number 10,763,141
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Niraj Merchant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing chamber
- Patent number 10,741,428
- Issue date Aug 11, 2020
- Applied Materials, Inc.
- Aaron Muir Hunter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system, valve assembly, and processing method
- Patent number 10,665,476
- Issue date May 26, 2020
- Applied Materials, Inc.
- Efrain Quiles
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Slit valve door with moving mating part
- Patent number 10,453,718
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Mehran Behdjat
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Support ring with masked edge
- Patent number 10,373,859
- Issue date Aug 6, 2019
- Applied Materials, Inc.
- Mehran Behdjat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Support cylinder for thermal processing chamber
- Patent number 10,128,144
- Issue date Nov 13, 2018
- Applied Materials, Inc.
- Mehran Behdjat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support ring with masked edge
- Patent number 10,056,286
- Issue date Aug 21, 2018
- Applied Materials, Inc.
- Mehran Behdjat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphite susceptor
- Patent number 10,000,847
- Issue date Jun 19, 2018
- Applied Materials, Inc.
- Preetham Rao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterned heater pedestal
- Patent number D807481
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Dongming Iu
- D23 - Environmental heating and cooling
Information Patent Grant
Support ring with masked edge
- Patent number 9,842,759
- Issue date Dec 12, 2017
- Applied Materials, Inc.
- Mehran Behdjat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Support cylinder for thermal processing chamber
- Patent number 9,659,809
- Issue date May 23, 2017
- Applied Materials, Inc.
- Mehran Behdjat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle control in laser processing systems
- Patent number 9,579,750
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Aaron Muir Hunter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for reducing the effect of contamination on a rapid therm...
- Patent number 9,514,969
- Issue date Dec 6, 2016
- Applied Materials, Inc.
- Aaron Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support cylinder for thermal processing chamber
- Patent number 9,385,004
- Issue date Jul 5, 2016
- Applied Materials, Inc.
- Mehran Behdjat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support ring with masked edge
- Patent number 9,330,955
- Issue date May 3, 2016
- Applied Materials, Inc.
- Mehran Behdjat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Test apparatus for reflective cavity characterization
- Patent number 9,140,647
- Issue date Sep 22, 2015
- Applied Materials, Inc.
- Joseph M. Ranish
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam welding of large vacuum chamber body having a high em...
- Patent number 8,915,389
- Issue date Dec 23, 2014
- Applied Materials, Inc.
- Shinichi Kurita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Test apparatus for reflective cavity characterization
- Patent number 8,896,837
- Issue date Nov 25, 2014
- Applied Materials, Inc.
- Joseph M. Ranish
- G01 - MEASURING TESTING
Information Patent Grant
Thermal reactor with improved gas flow distribution
- Patent number 8,888,916
- Issue date Nov 18, 2014
- Applied Materials, Inc.
- Ming-Kuei (Michael) Tseng
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Processing system with the dual end-effector handling
- Patent number 8,796,589
- Issue date Aug 5, 2014
- Applied Materials, Inc.
- Efrain Quiles
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
High temperature vacuum chuck assembly
- Patent number 8,698,048
- Issue date Apr 15, 2014
- Applied Materials, Inc.
- Alexander N. Lerner
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Thermal reactor with improved gas flow distribution
- Patent number 8,608,853
- Issue date Dec 17, 2013
- Applied Materials, Inc.
- Ming-Kuei (Michael) Tseng
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Slit valve door able to compensate for chamber deflection
- Patent number 8,567,756
- Issue date Oct 29, 2013
- Applied Materials, Inc.
- Mehran Behdjat
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Electron beam welding of large vacuum chamber body having a high em...
- Patent number 8,528,762
- Issue date Sep 10, 2013
- Applied Materials, Inc.
- Shinichi Kurita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of thermally treating silicon with oxygen
- Patent number 8,497,193
- Issue date Jul 30, 2013
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Water cooled gas injector
- Patent number 8,409,353
- Issue date Apr 2, 2013
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin for substrate processing
- Patent number 8,256,754
- Issue date Sep 4, 2012
- Applied Materials, Inc.
- Alexander N. Lerner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measurement and control of wafer support in thermal pro...
- Patent number 8,222,574
- Issue date Jul 17, 2012
- Applied Materials, Inc.
- Khurshed Sorabji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ENABLE CVD CHAMBER PROCESS WAFERS AT DIFFERENT TEMPERATURES
- Publication number 20240352588
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Peiqi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW STRESS TUNGSTEN LAYER DEPOSITION
- Publication number 20240266215
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Xi CEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LAMP HOUSING CRACK DETECTION
- Publication number 20240027295
- Publication date Jan 25, 2024
- Philip MATHEW
- G01 - MEASURING TESTING
Information Patent Application
SUPPORT RING WITH MASKED EDGE
- Publication number 20180315639
- Publication date Nov 1, 2018
- Applied Materials, Inc.
- Mehran BEHDJAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRAPHITE SUSCEPTOR
- Publication number 20180298494
- Publication date Oct 18, 2018
- Applied Materials, Inc.
- Preetham RAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-CONTACT TEMPERATURE CALIBRATION TOOL FOR A SUBSTRATE SUPPORT AN...
- Publication number 20180269089
- Publication date Sep 20, 2018
- Applied Materials, Inc.
- Niraj MERCHANT
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUPPORT RING WITH MASKED EDGE
- Publication number 20180102274
- Publication date Apr 12, 2018
- Applied Materials, Inc.
- Mehran BEHDJAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20170294325
- Publication date Oct 12, 2017
- Applied Materials, Inc.
- Aaron Muir HUNTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHUCK PRESSURE CONTROL SYSTEM
- Publication number 20170294333
- Publication date Oct 12, 2017
- Applied Materials, Inc.
- Dongming IU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT CYLINDER FOR THERMAL PROCESSING CYLINDER
- Publication number 20170263493
- Publication date Sep 14, 2017
- Applied Materials, Inc.
- Mehran BEHDJAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT CYLINDER FOR THERMAL PROCESSING CHAMBER
- Publication number 20160300752
- Publication date Oct 13, 2016
- Applied Materials, Inc.
- Mehran BEHDJAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT RING WITH MASKED EDGE
- Publication number 20160247708
- Publication date Aug 25, 2016
- Applied Materials, Inc.
- Mehran BEHDJAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRAPHITE SUSCEPTOR
- Publication number 20160083840
- Publication date Mar 24, 2016
- Applied Materials, Inc.
- PREETHAM RAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHUCKING CAPABILITY FOR BOWED WAFERS ON DSA
- Publication number 20150228528
- Publication date Aug 13, 2015
- Applied Materials, Inc.
- Mehran BEHDJAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT RING WITH MASKED EDGE
- Publication number 20150187630
- Publication date Jul 2, 2015
- Applied Materials, Inc.
- Mehran BEHDJAT
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS FOR REDUCING THE EFFECT OF CONTAMINATION ON A RAPID THERM...
- Publication number 20150155190
- Publication date Jun 4, 2015
- Applied Materials, Inc.
- Aaron MILLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEST APPARATUS FOR REFLECTIVE CAVITY CHARACTERIZATION
- Publication number 20150070686
- Publication date Mar 12, 2015
- Applied Materials, Inc.
- Joseph M. RANISH
- G01 - MEASURING TESTING
Information Patent Application
SUPPORT CYLINDER FOR THERMAL PROCESSING CHAMBER
- Publication number 20150050819
- Publication date Feb 19, 2015
- Applied Materials, Inc.
- Mehran BEHDJAT
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, VALVE ASSEMBLY, AND PROCESSING METHOD
- Publication number 20150013771
- Publication date Jan 15, 2015
- Applied Materials, Inc.
- Efrain Quiles
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION
- Publication number 20140079376
- Publication date Mar 20, 2014
- Applied Materials, Inc.
- Ming-Kuei (Michael) TSENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLIT VALVE DOOR WITH MOVING MATING PART
- Publication number 20140023460
- Publication date Jan 23, 2014
- Applied Materials, Inc.
- Mehran BEHDJAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM WELDING OF LARGE VACUUM CHAMBER BODY HAVING A HIGH EM...
- Publication number 20130327764
- Publication date Dec 12, 2013
- Applied Materials, Inc.
- SHINICHI KURITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PARTICLE CONTROL IN LASER PROCESSING SYSTEMS
- Publication number 20130087547
- Publication date Apr 11, 2013
- Applied Materials, Inc.
- Aaron Muir Hunter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH TEMPERATURE VACUUM CHUCK ASSEMBLY
- Publication number 20120205878
- Publication date Aug 16, 2012
- Alexander N. Lerner
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION
- Publication number 20120058648
- Publication date Mar 8, 2012
- Ming-Kuei (Michael) Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Water cooled gas injector
- Publication number 20120031332
- Publication date Feb 9, 2012
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of thermally treating silicon with oxygen
- Publication number 20110250764
- Publication date Oct 13, 2011
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASUREMENT AND CONTROL OF WAFER SUPPORT IN THERMAL PRO...
- Publication number 20110089166
- Publication date Apr 21, 2011
- AARON MUIR HUNTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM WELDING OF LARGE VACUUM CHAMBER BODY HAVING A HIGH EM...
- Publication number 20100122982
- Publication date May 20, 2010
- Applied Materials, Inc.
- SHINICHI KURITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LOAD LOCK CHAMBER FOR LARGE AREA SUBSTRATE PROCESSING SYSTEM
- Publication number 20100054905
- Publication date Mar 4, 2010
- MEHRAN BEHDJAT
- H01 - BASIC ELECTRIC ELEMENTS

Mehran Behdjat

Person

Patents Grantslast 30 patents

Vacuum chuck pressure control system

Graphite susceptor

Non-contact temperature calibration tool for a substrate support an...

Semiconductor processing chamber

Substrate processing system, valve assembly, and processing method

Slit valve door with moving mating part

Support ring with masked edge

Support cylinder for thermal processing chamber

Support ring with masked edge

Graphite susceptor

Patterned heater pedestal

Support ring with masked edge

Support cylinder for thermal processing chamber

Particle control in laser processing systems

Apparatus for reducing the effect of contamination on a rapid therm...

Support cylinder for thermal processing chamber

Support ring with masked edge

Test apparatus for reflective cavity characterization

Electron beam welding of large vacuum chamber body having a high em...

Test apparatus for reflective cavity characterization

Thermal reactor with improved gas flow distribution

Processing system with the dual end-effector handling

High temperature vacuum chuck assembly

Thermal reactor with improved gas flow distribution

Slit valve door able to compensate for chamber deflection

Electron beam welding of large vacuum chamber body having a high em...

Method of thermally treating silicon with oxygen

Water cooled gas injector

Lift pin for substrate processing

Temperature measurement and control of wafer support in thermal pro...

Patents Applicationslast 30 patents

ENABLE CVD CHAMBER PROCESS WAFERS AT DIFFERENT TEMPERATURES

LOW STRESS TUNGSTEN LAYER DEPOSITION

METHOD AND APPARATUS FOR LAMP HOUSING CRACK DETECTION

SUPPORT RING WITH MASKED EDGE

GRAPHITE SUSCEPTOR

NON-CONTACT TEMPERATURE CALIBRATION TOOL FOR A SUBSTRATE SUPPORT AN...

SUPPORT RING WITH MASKED EDGE

SEMICONDUCTOR PROCESSING CHAMBER

VACUUM CHUCK PRESSURE CONTROL SYSTEM

SUPPORT CYLINDER FOR THERMAL PROCESSING CYLINDER

SUPPORT CYLINDER FOR THERMAL PROCESSING CHAMBER

SUPPORT RING WITH MASKED EDGE

GRAPHITE SUSCEPTOR

CHUCKING CAPABILITY FOR BOWED WAFERS ON DSA

SUPPORT RING WITH MASKED EDGE

APPARATUS FOR REDUCING THE EFFECT OF CONTAMINATION ON A RAPID THERM...

TEST APPARATUS FOR REFLECTIVE CAVITY CHARACTERIZATION

SUPPORT CYLINDER FOR THERMAL PROCESSING CHAMBER

SUBSTRATE PROCESSING SYSTEM, VALVE ASSEMBLY, AND PROCESSING METHOD

THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION

SLIT VALVE DOOR WITH MOVING MATING PART

ELECTRON BEAM WELDING OF LARGE VACUUM CHAMBER BODY HAVING A HIGH EM...

PARTICLE CONTROL IN LASER PROCESSING SYSTEMS

HIGH TEMPERATURE VACUUM CHUCK ASSEMBLY

THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION

Water cooled gas injector

Method of thermally treating silicon with oxygen

TEMPERATURE MEASUREMENT AND CONTROL OF WAFER SUPPORT IN THERMAL PRO...

ELECTRON BEAM WELDING OF LARGE VACUUM CHAMBER BODY HAVING A HIGH EM...

LOAD LOCK CHAMBER FOR LARGE AREA SUBSTRATE PROCESSING SYSTEM