Mehran Naser-Ghodsi

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Hamilton, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Structural modification using electron beam activated chemical etch
- Patent number 8,052,885
- Issue date Nov 8, 2011
- KLA-Tencor Corporation
- Mehran Naser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etch selectivity enhancement in electron beam activated chemical etch
- Patent number 7,879,730
- Issue date Feb 1, 2011
- KLA-Tencor Technologies Corporation
- Mehran Naser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Three-dimensional imaging using electron beam activated chemical etch
- Patent number 7,709,792
- Issue date May 4, 2010
- KLA-Tencor Technologies Corporation
- Mehran Naser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for endpoint detection in electron beam assist...
- Patent number 6,843,927
- Issue date Jan 18, 2005
- KLA-Tencor Technologies Corporation
- Mehran Naser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS