Mehran Nasser-Ghodsi

Person

Hamilton, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-column scanning electron microscopy system
- Patent number 10,354,832
- Issue date Jul 16, 2019
- KLA-Tencor Corporation
- Robert Haynes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter device with integrated multi-pole electrode structure
- Patent number 9,793,089
- Issue date Oct 17, 2017
- KLA-Tencor Corporation
- Thomas Plettner
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and methods for inspecting extreme ultra violet reticles
- Patent number 9,679,372
- Issue date Jun 13, 2017
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-layer ceramic vacuum to atmosphere electric feed through
- Patent number 9,591,770
- Issue date Mar 7, 2017
- KLA-Tencor Corporation
- Robert Haynes
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for optical inspection, magnetic field and hei...
- Patent number 9,513,230
- Issue date Dec 6, 2016
- KLA-Tencor Corporation
- John Gerling
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Asymmetrical detector design and methodology
- Patent number 9,418,819
- Issue date Aug 16, 2016
- KLA-Tencor Corporation
- John Gerling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for inspecting extreme ultra violet reticles
- Patent number 8,953,869
- Issue date Feb 10, 2015
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sharp scattering angle trap for electron beam apparatus
- Patent number 8,890,066
- Issue date Nov 18, 2014
- KLA-Tencor Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring a characteristic of a substrate o...
- Patent number 8,765,496
- Issue date Jul 1, 2014
- KLA-Tencor Technologies Corp.
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Grant
Permanent magnet lens array
- Patent number 8,698,094
- Issue date Apr 15, 2014
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auger elemental identification algorithm
- Patent number 8,658,973
- Issue date Feb 25, 2014
- KLA-Tencor Corporation
- Mark Neil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Background reduction system including louver
- Patent number 8,633,457
- Issue date Jan 21, 2014
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for forming an electrical conduction path thr...
- Patent number 8,618,513
- Issue date Dec 31, 2013
- KLA-Tencor Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron generation and delivery system for contamination sensitive...
- Patent number 8,530,867
- Issue date Sep 10, 2013
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-planar extractor structure for electron source
- Patent number 8,513,619
- Issue date Aug 20, 2013
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple-column electron beam apparatus and methods
- Patent number 8,455,838
- Issue date Jun 4, 2013
- KLA-Tencor Corporation
- Khashayar Shadman
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle energy analyzer
- Patent number 8,421,030
- Issue date Apr 16, 2013
- KLA-Tencor Corporation
- Khashayar Shadman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ differential spectroscopy
- Patent number 8,283,631
- Issue date Oct 9, 2012
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Transverse focusing action in hyperbolic field detectors
- Patent number 8,237,120
- Issue date Aug 7, 2012
- KLA-Tencor Corporation
- Gabor Toth
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for electron beam assisted etching at low tem...
- Patent number 8,202,440
- Issue date Jun 19, 2012
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron generation and delivery system for contamination sensitive...
- Patent number 8,188,451
- Issue date May 29, 2012
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of ion implantation in chemical etching
- Patent number 8,008,207
- Issue date Aug 30, 2011
- KLA-Tencor Technologies Corporation
- Ming Lun Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Tungsten plug deposition quality evaluation method by EBACE technology
- Patent number 7,945,086
- Issue date May 17, 2011
- KLA-Tencor Technologies Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contamination pinning for auger analysis
- Patent number 7,855,362
- Issue date Dec 21, 2010
- KLA-Tencor Technologies Corporation
- Alan Brodie
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for e-beam dark imaging with perspective control
- Patent number 7,838,833
- Issue date Nov 23, 2010
- KLA-Tencor Technologies Corporation
- Matthew Lent
- G01 - MEASURING TESTING
Information Patent Grant
Sharpening metal carbide emitters
- Patent number 7,828,622
- Issue date Nov 9, 2010
- KLA-Tencor Technologies Corporation
- Alan Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auger electron spectrometer with applied magnetic field at target s...
- Patent number 7,755,042
- Issue date Jul 13, 2010
- KLA-Tencor Corporation
- Gabor D. Toth
- G01 - MEASURING TESTING
Information Patent Grant
Method and instrument for chemical defect characterization in high...
- Patent number 7,635,842
- Issue date Dec 22, 2009
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Grant
Transverse magnetic field voltage isolator
- Patent number 7,612,348
- Issue date Nov 3, 2009
- KLA-Technologies Corporation
- Alexander Jozef Gubbens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle microscopy using super resolution
- Patent number 7,598,492
- Issue date Oct 6, 2009
- KLA-Tencor Technologies Corporation
- Kenneth J. Krzeczowski
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Multi-Column Scanning Electron Microscopy System
- Publication number 20180358200
- Publication date Dec 13, 2018
- KLA-Tencor Corporation
- Robert Haynes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR INSPECTING EXTREME ULTRA VIOLET RETICLES
- Publication number 20150117754
- Publication date Apr 30, 2015
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRON EMITTER DEVICE WITH INTEGRATED MULTI-POLE ELECTRODE STRUCTURE
- Publication number 20150076988
- Publication date Mar 19, 2015
- KLA-Tencor Corporation
- Thomas Plettner
- B82 - NANO-TECHNOLOGY
Information Patent Application
DUMMY BARRIER LAYER FEATURES FOR PATTERNING OF SPARSELY DISTRIBUTED...
- Publication number 20150076697
- Publication date Mar 19, 2015
- KLA-Tencor Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASYMMETRICAL DETECTOR DESIGN AND METHODOLOGY
- Publication number 20150069234
- Publication date Mar 12, 2015
- KLA-Tencor Corporation
- John Gerling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LAYER CERAMIC VACUUM TO ATMOSPHERE ELECTRIC FEED THROUGH
- Publication number 20140318855
- Publication date Oct 30, 2014
- KLA-Tencor Corporation
- Robert Haynes
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods and Systems for Measuring a Characteristic of a Substrate o...
- Publication number 20140291516
- Publication date Oct 2, 2014
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR OPTICAL INSPECTION, MAGNETIC FIELD AND HEI...
- Publication number 20140218503
- Publication date Aug 7, 2014
- KLA-Tencor Corporation
- John Gerling
- G01 - MEASURING TESTING
Information Patent Application
AUGER ELEMENTAL IDENTIFICATION ALGORITHM
- Publication number 20130341504
- Publication date Dec 26, 2013
- KLA -TENCOR CORPORATION,
- Mark Neill
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR INSPECTING EXTREME ULTRA VIOLET RETICLES
- Publication number 20130336574
- Publication date Dec 19, 2013
- Mehran Nasser-Ghodsi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BACKGROUND REDUCTION SYSTEM INCLUDING LOUVER
- Publication number 20130001417
- Publication date Jan 3, 2013
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE-COLUMN ELECTRON BEAM APPARATUS AND METHODS
- Publication number 20130001418
- Publication date Jan 3, 2013
- Khashayar SHADMAN
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHODS FOR FORMING AN ELECTRICAL CONDUCTION PATH THR...
- Publication number 20120298879
- Publication date Nov 29, 2012
- Tomas PLETTNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE ENERGY ANALYZER
- Publication number 20110168886
- Publication date Jul 14, 2011
- KLA-Tencor Corporation
- Khashayar Shadman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNGSTEN PLUG DEPOSITION QUALITY EVALUATION METHOD BY EBACE TECHNOLOGY
- Publication number 20090010526
- Publication date Jan 8, 2009
- KLA-Tencor Technologies Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING A CHARACTERISTIC OF A SUBSTRATE O...
- Publication number 20080264905
- Publication date Oct 30, 2008
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND INSTRUMENT FOR CHEMICAL DEFECT CHARACTERIZATION IN HIGH...
- Publication number 20080197277
- Publication date Aug 21, 2008
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Application
USE OF ION IMPLANTATION IN CHEMICAL ETCHING
- Publication number 20070264831
- Publication date Nov 15, 2007
- KLA-Tencor Technologies Corporation
- Ming Lun Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THREE-DIMENSIONAL IMAGING USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH
- Publication number 20070158562
- Publication date Jul 12, 2007
- KLA-Tencor Technologies Corporation
- MEHRAN NASSER-GHODSI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURAL MODIFICATION USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH
- Publication number 20070158303
- Publication date Jul 12, 2007
- KLA-Tencor Technologies Corporation
- MEHRAN NASSER-GHODSI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCH SELECTIVITY ENHANCEMENT IN ELECTRON BEAM ACTIVATED CHEMICAL ETCH
- Publication number 20070158304
- Publication date Jul 12, 2007
- KLA-Tencor Technologies Corporation
- Mehran Nasser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Systems for Creating a Recipe for a Defect Review Process
- Publication number 20070067134
- Publication date Mar 22, 2007
- KLA-TENCOR TECHNOLOGIES CORP.
- S. Mark Borowicz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods and systems for measuring a characteristic of a substrate o...
- Publication number 20050221229
- Publication date Oct 6, 2005
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Application
Methods and apparatus for electron beam inspection of samples
- Publication number 20040041095
- Publication date Mar 4, 2004
- KLA-Tencor Technologies Corporation
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for endpoint detection in electron beam assist...
- Publication number 20040043621
- Publication date Mar 4, 2004
- KLA-Tencor Technologies Corporation, A Corporation of California
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for dishing and erosion characterization
- Publication number 20030142782
- Publication date Jul 31, 2003
- KLA-Tencor Technologies Corporation
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Application
Methods and apparatus for void characterization
- Publication number 20030063705
- Publication date Apr 3, 2003
- KLA-Tencor Technologies Corporation
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Application
Methods and apparatus for defect localization
- Publication number 20030062477
- Publication date Apr 3, 2003
- KLA-Tencor Technologies Corporation
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING

Mehran Nasser-Ghodsi

Person

Patents Grantslast 30 patents

Multi-column scanning electron microscopy system

Electron emitter device with integrated multi-pole electrode structure

Apparatus and methods for inspecting extreme ultra violet reticles

Multi-layer ceramic vacuum to atmosphere electric feed through

Apparatus and method for optical inspection, magnetic field and hei...

Asymmetrical detector design and methodology

Apparatus and methods for inspecting extreme ultra violet reticles

Sharp scattering angle trap for electron beam apparatus

Methods and systems for measuring a characteristic of a substrate o...

Permanent magnet lens array

Auger elemental identification algorithm

Background reduction system including louver

Apparatus and methods for forming an electrical conduction path thr...

Electron generation and delivery system for contamination sensitive...

Non-planar extractor structure for electron source

Multiple-column electron beam apparatus and methods

Charged-particle energy analyzer

In-situ differential spectroscopy

Transverse focusing action in hyperbolic field detectors

Methods and apparatus for electron beam assisted etching at low tem...

Electron generation and delivery system for contamination sensitive...

Use of ion implantation in chemical etching

Tungsten plug deposition quality evaluation method by EBACE technology

Contamination pinning for auger analysis

Apparatus and method for e-beam dark imaging with perspective control

Sharpening metal carbide emitters

Auger electron spectrometer with applied magnetic field at target s...

Method and instrument for chemical defect characterization in high...

Transverse magnetic field voltage isolator

Charged particle microscopy using super resolution

Patents Applicationslast 30 patents

Multi-Column Scanning Electron Microscopy System

APPARATUS AND METHODS FOR INSPECTING EXTREME ULTRA VIOLET RETICLES

ELECTRON EMITTER DEVICE WITH INTEGRATED MULTI-POLE ELECTRODE STRUCTURE

DUMMY BARRIER LAYER FEATURES FOR PATTERNING OF SPARSELY DISTRIBUTED...

ASYMMETRICAL DETECTOR DESIGN AND METHODOLOGY

MULTI-LAYER CERAMIC VACUUM TO ATMOSPHERE ELECTRIC FEED THROUGH

Methods and Systems for Measuring a Characteristic of a Substrate o...

APPARATUS AND METHOD FOR OPTICAL INSPECTION, MAGNETIC FIELD AND HEI...

AUGER ELEMENTAL IDENTIFICATION ALGORITHM

APPARATUS AND METHODS FOR INSPECTING EXTREME ULTRA VIOLET RETICLES

BACKGROUND REDUCTION SYSTEM INCLUDING LOUVER

MULTIPLE-COLUMN ELECTRON BEAM APPARATUS AND METHODS

APPARATUS AND METHODS FOR FORMING AN ELECTRICAL CONDUCTION PATH THR...

CHARGED-PARTICLE ENERGY ANALYZER

TUNGSTEN PLUG DEPOSITION QUALITY EVALUATION METHOD BY EBACE TECHNOLOGY

METHODS AND SYSTEMS FOR MEASURING A CHARACTERISTIC OF A SUBSTRATE O...

METHOD AND INSTRUMENT FOR CHEMICAL DEFECT CHARACTERIZATION IN HIGH...

USE OF ION IMPLANTATION IN CHEMICAL ETCHING

THREE-DIMENSIONAL IMAGING USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH

STRUCTURAL MODIFICATION USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH

ETCH SELECTIVITY ENHANCEMENT IN ELECTRON BEAM ACTIVATED CHEMICAL ETCH

Methods and Systems for Creating a Recipe for a Defect Review Process

Methods and systems for measuring a characteristic of a substrate o...

Methods and apparatus for electron beam inspection of samples

Method and apparatus for endpoint detection in electron beam assist...

Methods and apparatus for dishing and erosion characterization

Methods and apparatus for void characterization

Methods and apparatus for defect localization