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Mehrdad Moshfegh
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San Jose, CA, US
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last 30 patents
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Patent Grant
Upper chamber for high density plasma CVD
Patent number
7,354,501
Issue date
Apr 8, 2008
Applied Materials, Inc.
Sudhir Gondhalekar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Upper chamber for high density plasma CVD
Publication number
20030213434
Publication date
Nov 20, 2003
Applied Materials, Inc.
Sudhir Gondhalekar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...