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Mei-Shong Kuo
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Hsinchu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Etch profile control of isolation trench
Patent number
12,040,219
Issue date
Jul 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsien-Chung Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple etch method for fabricating spacer layers
Patent number
6,764,911
Issue date
Jul 20, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Jw-Wang Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Masking layer method for forming a spacer layer with enhanced linew...
Patent number
6,440,875
Issue date
Aug 27, 2002
Taiwan Semiconductor Manufacturing Co., Ltd
Bor-Wen Chan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selectivity oxide-to-oxynitride etch process using a fluorine conta...
Patent number
6,436,841
Issue date
Aug 20, 2002
Taiwan Semiconductor Manufacturing Company
Ming Huan Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Power network for collecting distributed powers
Patent number
6,157,272
Issue date
Dec 5, 2000
Mei-Shong Kuo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ETCH PROFILE CONTROL OF ISOLATION TRENCH
Publication number
20240332062
Publication date
Oct 3, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsien-Chung HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH PROFILE CONTROL OF ISOLATION TRENCH
Publication number
20220301922
Publication date
Sep 22, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsien-Chung HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multiple etch method for fabricating spacer layers
Publication number
20030211697
Publication date
Nov 13, 2003
Taiwan Semiconductor Manufacturing Co., Ltd.
Jw-Wang Hsu
H01 - BASIC ELECTRIC ELEMENTS