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Meihan Guo
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Jiangsu, CN
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last 30 patents
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Patent Grant
Parallel plate capacitor and acceleration sensor comprising same
Patent number
9,903,884
Issue date
Feb 27, 2018
CSMC Technologies FAB1 Co. Ltd.
Meihan Guo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
PARALLEL PLATE CAPACITOR AND ACCELERATION SENSOR COMPRISING SAME
Publication number
20150233965
Publication date
Aug 20, 2015
CSMC TECHNOLOGIES FAB1 CO., LTD.
Meihan Guo
B81 - MICRO-STRUCTURAL TECHNOLOGY