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Meiki Koh

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Dry-etching method
    • Patent number 7,531,460
    • Issue date May 12, 2009
    • Tokyo Electron Limited
    • Etsuo Iijima
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Dry-etching method
    • Publication number 20060172546
    • Publication date Aug 3, 2006
    • TOKYO ELECTON LIMITED
    • Etsuo Iijima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dry-etching method
    • Publication number 20040171254
    • Publication date Sep 2, 2004
    • Etsuo Iijima
    • H01 - BASIC ELECTRIC ELEMENTS