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Melisa LUCA
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Breda, NL
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last 30 patents
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Patent Grant
Method of controlling a patterning process, lithographic apparatus,...
Patent number
11,048,174
Issue date
Jun 29, 2021
ASML Netherlands B.V.
Michael Kubis
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
METHOD OF CONTROLLING A PATTERNING PROCESS, LITHOGRAPHIC APPARATUS,...
Publication number
20200233311
Publication date
Jul 23, 2020
Michael KUBIS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY