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Meng Cao
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Union City, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Automatic selection of sample values for optical metrology
Patent number
10,895,810
Issue date
Jan 19, 2021
KLA Corporation
Meng Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement library optimization in semiconductor metrology
Patent number
10,732,520
Issue date
Aug 4, 2020
KLA-Tencor Corporation
Meng Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Automated metrology system selection
Patent number
10,502,692
Issue date
Dec 10, 2019
KLA-Tencor Corporation
Meng Cao
G01 - MEASURING TESTING
Information
Patent Grant
Measurement library optimization in semiconductor metrology
Patent number
10,345,721
Issue date
Jul 9, 2019
KLA-Tencor Corporation
Meng Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology system, method, and computer program product employing au...
Patent number
10,190,868
Issue date
Jan 29, 2019
KLA-Tencor Corporation
Liequan Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multi-model metrology
Patent number
9,412,673
Issue date
Aug 9, 2016
KLA-Tencor Corporation
In-Kyo Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Automated Metrology System Selection
Publication number
20170023491
Publication date
Jan 26, 2017
KLA-Tencor Corporation
Meng Cao
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT EMPLOYING AU...
Publication number
20160320315
Publication date
Nov 3, 2016
KLA-Tencor Corporation
Liequan Lee
G01 - MEASURING TESTING
Information
Patent Application
MULTI-MODEL METROLOGY
Publication number
20160322267
Publication date
Nov 3, 2016
KLA-Tencor Corporation
In-Kyo Kim
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
AUTOMATIC SELECTION OF SAMPLE VALUES FOR OPTICAL METROLOGY
Publication number
20150142395
Publication date
May 21, 2015
Meng Cao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MULTI-MODEL METROLOGY
Publication number
20150058813
Publication date
Feb 26, 2015
KLA-Tencor Corporation
In-Kyo Kim
G06 - COMPUTING CALCULATING COUNTING